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Articles 1 - 13 of 13
Full-Text Articles in Entire DC Network
An Implantable Low Pressure, Low Drift, Dual Biopressure Sensor And In-Vivo Calibration Methods Thereof, Chad Eric Seaver
An Implantable Low Pressure, Low Drift, Dual Biopressure Sensor And In-Vivo Calibration Methods Thereof, Chad Eric Seaver
Doctoral Dissertations
The human body’s intracranial pressure (ICP) is a critical component in sustaining healthy blood flow to the brain while allowing adequate volume for brain tissue within the rigid structures of the cranium. Disruptions in the body’s autoregulation of intracranial pressure are often caused by hemorrhage, tumors, edema, or excess cerebral spinal fluid resulting in treatments that are estimated to globally cost up to approximately five billion dollars annually. A critical element in the contemporary management of acute head injury, intracranial hemorrhage, stroke, or other conditions resulting in intracranial hypertension, is the real-time monitoring of ICP. Currently, such mainstream clinical monitoring …
Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra
Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra
Electronic Theses and Dissertations
We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers at …
Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick
Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick
Faculty Publications
This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations.
In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan
In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan
Doctoral Dissertations
In situ heating holders offer the possibility of studying thermally activated processes by performing real time, high temperature experiments inside the transmission electron microscope. The poor thermal stability of traditional furnace-type heating holders limits their use to a narrow range of materials and processes. Modern micro electro mechanical system (MEMS) based heating holders have significantly improved the ability to perform such experiments and have led to a revival in the field of in situ TEM. The excellent thermal stability of the MEMS devices allows us to carry out controlled heating and cooling experiments on both particulate and bulk samples at …
Fabrication And Characterization Of A Magnetohydrodynamic Micropump From Polydimethylsiloxane (Pdms), Rachel K. Weber
Fabrication And Characterization Of A Magnetohydrodynamic Micropump From Polydimethylsiloxane (Pdms), Rachel K. Weber
Graduate Theses - Chemical Engineering
Microfluidics is a growing area of study in recent years, particularly for lab-on-a-chip applications. Fluids must oftentimes be transported from one location on the chip to another. This study focuses on the fabrication and characterization of a magnetohydrodynamic micropump. The device was fabricated in the Rose-Hulman Institute of Technology MiNDS facility, and consisted of a PDMS channel and titanium electrodes supported on a glass slide with a permanent magnet. An Arduino microcontroller capable of pulse width modulation (PWM) was used to control the electrical potential. An electrode design that spanned the full length of the channel was successful in driving …
A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian
A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian
Mechanical Engineering Faculty Scholarship
In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the electrode. …
Iridium Oxide (Iro2) As A Top Electrode For Ferroelectric Micro-Electro-Mechanical Systems (Mems) Devices For Radiation Rich Environments, Manuel Rivas
Doctoral Dissertations
The multifunctional properties of ferroelectric materials make them ideal components for numerous applications including for extreme environments such as space. Iridium oxide (IrO2) electrodes have been demonstrated to improve the lifetime of ferroelectric memory devices, however little is known about its influence on the electromechanical properties important for ferroelectric microelectromechanical systems (MEMS). The performance of thin film lead zirconate titanate (PZT) based MEMS is affected by the processing conditions, composition, device design, electrode materials, and the environment. This work details the development and characterization of iridium oxide electrodes for PZT based microelectromechanical and pyroelectric-harvesting systems, fabrication induced defects, and design …
Influence Of Environmental Conditions On The Response Of Mems Resonators, Mohammad H. Hasan
Influence Of Environmental Conditions On The Response Of Mems Resonators, Mohammad H. Hasan
Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research
Micro-electro-mechanical-system (MEMS) devices are increasingly employed in physical systems to fill the growing demand for fast, small, cheap sensors. And with MEMS devices rapidly becoming miniaturized to increase accuracy and reduce response time, analysis of their reliability in different environments is increasingly needed. Furthermore, new sensor designs for applications such as temperature, humidity and pressure sensors, that directly utilize the MEMS interactions within their environments, are growing in demand. In this work, a comprehensive study of the response of MEMS cantilever and clamped-clamped resonators under various environmental conditions is performed in both the linear and nonlinear regimes. The study shows …
Development Of Microdialysis Probes In Series Approach Toward Eliminating Microdialysis Sampling Calibration: Miniaturization Into A Pdms Microfluidic Device, Randy Espinal Cabrera
Development Of Microdialysis Probes In Series Approach Toward Eliminating Microdialysis Sampling Calibration: Miniaturization Into A Pdms Microfluidic Device, Randy Espinal Cabrera
Graduate Theses and Dissertations
A new microdialysis sampling method and microfluidic device were developed in vitro. The method consisted of using up to four microdialysis sampling probes connected in series to evaluate the relative recovery (RR) of different model solutes methyl orange, fluorescein isothiocyanate (FITC)-dextran average mol. wt. 4,000 (FITC-4), FITC-10, FITC-20, and FITC-40. Different flow rates (0.8, 1.0, and 1.5 µL/min) were used to compare experimentally observed relative recoveries with theoretical estimations. With increasing the number of probes in series, the relative recovery increases and ~100% (99.7% ± 0.9%) relative recovery for methyl orange was obtained. For larger molecules such as fluorescein isothiocyanate …
Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola
Journal of the Microelectronic Engineering Conference
From Merriam-Webster dictionary, it states that peristalsis can best be described as "successive waves of involuntary contraction passing along the walls of a hollow muscular structure (such as the esophagus or intestine) and forcing the contents on- ward"[1]. The objective of this project was to create a peristaltic micropump at the Rochester Institute of Technology (RIT) Semiconductor and Microsystem Fabrication Laboratory (SMFL). Using Micro-Electro-Mechanical Systems (MEMS) to create a peristaltic pump to lower the energy used to move a uid through a tube. Using three single micro- machined micro-pumps in a straight line to create this type of action. Fabrication …
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang
Journal of the Microelectronic Engineering Conference
This paper focuses on the design and fabrication of a surface MEMS three-axis accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y-direction, and 5G in the z-direction on a single device using capacitve sensing. The fabrication process was performed in the Semiconductor and Microsystems Laboratory (SMFL), with a 7 level process flow to achieve the desired features. The accelerometer was designed to have a movable top electrode with sensing fingers attached to it to sense the change in capacitance the x/y-direction and a bottom electrode to sense the change in z-direction. The paper will focus on …
Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas
Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas
Master's Theses
Micro-electro-mechanical-systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in-situ. Atomic Force Microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored …
Design And Evaluation Of Novel Attitude Estimation System Using Mems Sensors For Indoor Uas, Joshua Bruce Milam
Design And Evaluation Of Novel Attitude Estimation System Using Mems Sensors For Indoor Uas, Joshua Bruce Milam
Graduate Theses, Dissertations, and Problem Reports
Most small unmanned aerial systems in use today, employ extended Kalman filter sensor fusion algorithms in order to provide accurate estimations of attitude or orientation. These complex algorithms use measurements from GPS receivers and magnetometer sensors that can be rendered useless in GPS denied environments or areas of significant magnetic interference, such as inside buildings or other structures. The complexity of these algorithms makes them inaccessible for some researchers and hobbyists who wish to code their own attitude estimation algorithms. This complexity is also computationally expensive and requires processors that are powerful enough to operate the algorithms along with any …