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Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Microsystem And Electrochemistry, Zhong_Qun Tian, Jian-Jun Sun
Journal of Electrochemistry
Microsystem or micro electromechanical system (MEMS) is briefly introduced. The electrochemical applications in microsystem are reviewed and prospective applications of microsystem in electrochemistry are discussed. Along with the rapid development of micro_ analytical chemical systems or lab_on_chips in 21st century, electrochemistry may play an increasingly important role in microsystem technology.
Investigation Of Silicon Etching Effects For Monolithic Integration Of Mems With Cmos, Matthew J. Daniello
Investigation Of Silicon Etching Effects For Monolithic Integration Of Mems With Cmos, Matthew J. Daniello
Journal of the Microelectronic Engineering Conference
Monolithic integration of CMOS and MEMS is quickly proving to be a viable asset to current complex structures. However, synthesis of these technologies has proven to have multiple processing obstacles. Depending on the method used to create these devices, the hurdles include the effects of silicon etching and high temperature processing. For this experiment, previously processed CMOS wafers were obtained and a trench was etched into the silicon. “Family of curves” plots of the working CMOS wafers were taken before and after processing to study any changes in ID. Results have shown that the processing of this integration will …