Open Access. Powered by Scholars. Published by Universities.®

Digital Commons Network

Open Access. Powered by Scholars. Published by Universities.®

PDF

MEMS

Discipline
Institution
Publication Year
Publication
Publication Type

Articles 1 - 30 of 271

Full-Text Articles in Entire DC Network

Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund Dec 2019

Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund

Theses and Dissertations

Carbon nanotube templated microfabrication (CNT-M) is a term describing a grouping of processes where carbon nanotubes (CNTs) serve a structural role in the fabrication of a material or device. In its basic form, CNT-M is comprised of two steps: produce a template made from carbon nanotubes and infiltrate the porous template with an additional material. Vertically aligned carbon nanotube (VACNT) templates can be grown to heights ranging from microns to millimeters and lithographically patterned to a desired form. Deposition of an existing thin film material onto a CNT template will coat all template surfaces and can produce a near solid ...


Pairing Electrostatic Levitation With Triboelectric Transduction For High-Performance Self-Powered Mems Sensors And Actuators, Mark Pallay, Alwathiqbellah I. Ibrahim, Ronald N. Miles, Shahrzad Towfighian Sep 2019

Pairing Electrostatic Levitation With Triboelectric Transduction For High-Performance Self-Powered Mems Sensors And Actuators, Mark Pallay, Alwathiqbellah I. Ibrahim, Ronald N. Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We demonstrate that an electrostatic levitation MEMS switch can be operated by applying mechanical pres- sure to a triboelectric generator. The toggling mechanism of the switch draws no current but requires a high actuating voltage, while the generator can supply a high voltage but only produces microwatts of power. The synergistic combination results in an entirely self-powered sensor and switch; the normally-closed MEMS switch can be toggled open by applying a threshold force to the generator without the need for any outside power or supplementary circuitry. A model of the MEMS switch and electrostatic force is validated with experimental data ...


Mems Gradiometers For Attitude Determination On Cubesats, Giovanna Marocco, Richard Middlemiss, Abhinav Prasad, S. Hild, J. Hough, S. Rowan, Giles D. Hammond, Andreas Noak, Douglas J. Paul, Andrew Strain, P. Anderson, Hazel Jeffrey Aug 2019

Mems Gradiometers For Attitude Determination On Cubesats, Giovanna Marocco, Richard Middlemiss, Abhinav Prasad, S. Hild, J. Hough, S. Rowan, Giles D. Hammond, Andreas Noak, Douglas J. Paul, Andrew Strain, P. Anderson, Hazel Jeffrey

Small Satellite Conference

This paper presents the design, fabrication and testing of a new high sensitivity gravity sensor for attitude determination in CubeSats. The project is a collaboration between the Institute for Gravitational Research at the University of Glasgow and ÅAC-Clyde. The gravitational gradiometer takes advantages of the technology of microelectromechanical systems (MEMS) and determines the attitude of the satellite by a differential gravity measurement, the principle at the base of gravitational gradiometry. The capacitive readout allows to measure the rotation of the MEMS gradiometer and consequently evaluate the angle changes of the CubeSat. The developed geometry consists of two symmetrical masses connected ...


Evaluation Of Pixel-Scale Tunable Fabry-Perot Filters For Optical Imaging, Daniel L. Edwards Aug 2019

Evaluation Of Pixel-Scale Tunable Fabry-Perot Filters For Optical Imaging, Daniel L. Edwards

Theses

The Fabry-Perot interferometer (FPI) is a well-developed and widely used tool to control and measure wavelengths of light. In optical imaging applications, there is often a need for systems with compact, integrated, and widely tunable spectral filtering capabilities. We evaluate the performance of a novel tunable MEMS (Micro-Electro-Mechanical System) Fabry-Perot (FP) filter device intended to be monolithically integrated over each pixel of a focal plane array. This array of individually tunable FPIs have been designed to operate across the visible light spec-trum from 400-750 nm. This design can give rise to a new line of compact spectrometers with fewer moving ...


Multiple Imu Sensor Fusion For Suas Navigation And Photogrammetry, Matthew Givens Aug 2019

Multiple Imu Sensor Fusion For Suas Navigation And Photogrammetry, Matthew Givens

All Graduate Theses and Dissertations

Inertial measurement units (IMUs) are devices that sense accelerations and angular rates in 3D so that vehicles and other devices can estimate their orientations, positions, and velocities. While traditionally large, heavy, and costly, using mechanical gyroscopes and stabilized platforms, the recent development of micro-electromechanical sensor (MEMS) IMUs that are small, light, and inexpensive has led to their adoption in many everyday systems such as cell phones, video game controllers, and commercial drones. MEMS IMUs, despite their advantages, have major drawbacks when it comes to accuracy and reliability. The idea of using more than one of these sensors in an array ...


Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung Apr 2019

Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung

Master's Theses (2009 -)

This thesis presents flowmeter devices which can measure flowrate, pressure and temperature offlowing liquid samples using thermal measurement method. Typical thermal mass flowmeter usesthermal properties of materials to obtain flow features only for gases. We designed and fabricatedflowmeter devices with various functionalities such as: measuring properties of flowing liquid andidentifying the type of liquid samples.Thermal measurement methods using temperature sensor is a key of our flowmeter’s workingprinciple. The thermal mass flowmeter consists of a glass capillary, a tungsten wire heater, and aresistance temperature detector (RTD) sensor. The heater and sensors are integrated ...


Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani Feb 2019

Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani

Doctoral Dissertations

This work presents a novel counter-flow design for thermal stabilization of microfluidic thermal reactors. In these reactors, precise control of temperature of the liquid sample is achieved by moving the liquid sample through the thermal zones established ideally through the conduction in the solid material of the device. The goal here is to establish a linear thermal distribution when there is no flow and to minimize the temperature change at flow condition. External convection as well as internal flowinduced effects influence the prescribed thermal distribution. The counter-flow thermal gradient device developed in this study is capable of both stabilizing the ...


Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash Jan 2019

Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash

Electronic Thesis and Dissertation Repository

The aim of the present research is to understand the bouncing dynamic behavior of NEM/MEM switches in order to improve the switch performance and reliability. It is well known that the bouncing can dramatically degrade the switch performance and life; hence, in the present study, bouncing dynamics of a cantilever-based NME/MEM switch has been studied in detail. To this end, a model of a MEM switch that incorporates electrostatic force, squeeze film air damping force as well as asperity-based contact force has been proposed for an electrostatically actuated switch. An actuation force due to piezoelectric effects is further ...


Conductivity Modulation In Strained 2d Transition- Metal- Dichalcogenides Via Micro- Electro- Mechanical Actuation, Aldo Ivan Vidaña Jan 2019

Conductivity Modulation In Strained 2d Transition- Metal- Dichalcogenides Via Micro- Electro- Mechanical Actuation, Aldo Ivan Vidaña

Open Access Theses & Dissertations

In this thesis, strain-induced conductivity modulation in bi-layer molybdenum disulfide (MoS2) flakes is experimentally investigated and modeled. Uniaxial tensile strain in the MoS2 flakes is achieved using a micro-electro-mechanical (MEM) actuator. Conductivity ratios up to 400 are demonstrated. Theoretical predictions of conductivity versus applied voltage in the MEMS-MoS2 device match experimental data reasonably well using only the effective width of the TMDC flakes as the sole fitting parameter. The amount of strain induced in the MoS2 flakes was determined to be as high as 2.7% for one flake using the model fitted to the experiment data. The switching energy ...


A Tunable Electrostatic Mems Pressure Switch, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian Jan 2019

A Tunable Electrostatic Mems Pressure Switch, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We demonstrate a tunable air pressure switch. The switch detects when the ambient pressure drops below a threshold value and automatically triggers without the need for any computational overhead to read the pressure or trigger the switch. The switch exploits the significant fluid interaction of a MEMS beam undergoing a large oscillation from electrostatic levitation to detect changes in ambient pressure. If the oscillation amplitude near the resonant frequency is above a threshold level, dynamic pullin is triggered and the switch is closed. The pressure at which the switch closes can be tuned by adjusting the voltage applied to the ...


The Development Of Mems-Based Implantable Oxygen Sensing Systems, Didi She Jan 2019

The Development Of Mems-Based Implantable Oxygen Sensing Systems, Didi She

Publicly Accessible Penn Dissertations

Oxygen-based cues are direct assessments for a wide range of in vivo biological effects, ranging from mitochondrial disease to tissue engineering/regenerative medicine. Existing electrochemical oxygen sensors are permanent systems applicable to short-term intraoperative use; devices are extracted before wound closure. Development of biocompatible oxygen sensors for long-term, post-surgery monitoring are therefore, desirable for clinical trials where objective oxygen measures are lacking. A biodegradable oxygen sensor that can break down into non-toxic components after a targeted lifespan, reducing the risk of chronic inflammatory response frequently observed with permanent devices, is another promising approach to advance the postoperative monitoring of oxygen ...


A Miniaturized Chemical Vapor Detector Using Mems Flexible Platform, Haleh Nazemi Jan 2019

A Miniaturized Chemical Vapor Detector Using Mems Flexible Platform, Haleh Nazemi

Electronic Theses and Dissertations

According to the Canadian Cancer Society, lung cancer is the one of the leading causes of cancer death. It has been shown that cancer survival chance depends on factors including the availability of early detection and diagnostic tools such as miniaturized and sensitive gas sensor. This can detect the released volatiles in addition to be implementable in portable electronics, which decisively improves the patient’s survival rate. Therefore, in this thesis and in an effort to develop high-sensitive and miniaturized gas sensor, a microelectromechanical systems (MEMS) platform is utilized. In this work, a sensitive gas sensor is proposed by employing ...


An Implantable Low Pressure, Low Drift, Dual Biopressure Sensor And In-Vivo Calibration Methods Thereof, Chad Eric Seaver Dec 2018

An Implantable Low Pressure, Low Drift, Dual Biopressure Sensor And In-Vivo Calibration Methods Thereof, Chad Eric Seaver

Doctoral Dissertations

The human body’s intracranial pressure (ICP) is a critical component in sustaining healthy blood flow to the brain while allowing adequate volume for brain tissue within the rigid structures of the cranium. Disruptions in the body’s autoregulation of intracranial pressure are often caused by hemorrhage, tumors, edema, or excess cerebral spinal fluid resulting in treatments that are estimated to globally cost up to approximately five billion dollars annually. A critical element in the contemporary management of acute head injury, intracranial hemorrhage, stroke, or other conditions resulting in intracranial hypertension, is the real-time monitoring of ICP. Currently, such mainstream ...


Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra Dec 2018

Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra

Electronic Theses and Dissertations

We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers ...


Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick Nov 2018

Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick

Faculty Publications

This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations.


In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan Nov 2018

In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan

Doctoral Dissertations

In situ heating holders offer the possibility of studying thermally activated processes by performing real time, high temperature experiments inside the transmission electron microscope. The poor thermal stability of traditional furnace-type heating holders limits their use to a narrow range of materials and processes. Modern micro electro mechanical system (MEMS) based heating holders have significantly improved the ability to perform such experiments and have led to a revival in the field of in situ TEM. The excellent thermal stability of the MEMS devices allows us to carry out controlled heating and cooling experiments on both particulate and bulk samples at ...


Work In Progress -- Balancing Prescribed And Project-Based Experiences In Microfabrication Laboratories, Chang-Soo Kim, Steve Eugene Watkins Oct 2018

Work In Progress -- Balancing Prescribed And Project-Based Experiences In Microfabrication Laboratories, Chang-Soo Kim, Steve Eugene Watkins

Steve Eugene Watkins

Student education for microfabrication processes needs to integrate theoretical understanding with process understanding. Instructional challenges exist in designing effective laboratory experiences. The pedagogical issues include linking theoretical lecture concepts to cost-effective laboratories, tailoring the relative time between lectures and laboratories, and balancing the laboratory assignments between prescribed and project-based experiences. We describe the progressive implementations of microfabrication laboratory experiences in graduate courses. The first offering has no laboratory activity. The prescribed laboratory and project-based laboratory components were gradually incorporated. All laboratory experiences were team-based and utilized cost-effective facilities. The assessments indicate that students prefer significant laboratory experience and that learning ...


Work In Progress -- Balancing Prescribed And Project-Based Experiences In Microfabrication Laboratories, Chang-Soo Kim, Steve Eugene Watkins Sep 2018

Work In Progress -- Balancing Prescribed And Project-Based Experiences In Microfabrication Laboratories, Chang-Soo Kim, Steve Eugene Watkins

Chang-Soo Kim

Student education for microfabrication processes needs to integrate theoretical understanding with process understanding. Instructional challenges exist in designing effective laboratory experiences. The pedagogical issues include linking theoretical lecture concepts to cost-effective laboratories, tailoring the relative time between lectures and laboratories, and balancing the laboratory assignments between prescribed and project-based experiences. We describe the progressive implementations of microfabrication laboratory experiences in graduate courses. The first offering has no laboratory activity. The prescribed laboratory and project-based laboratory components were gradually incorporated. All laboratory experiences were team-based and utilized cost-effective facilities. The assessments indicate that students prefer significant laboratory experience and that learning ...


Fabrication And Characterization Of A Magnetohydrodynamic Micropump From Polydimethylsiloxane (Pdms), Rachel K. Weber Aug 2018

Fabrication And Characterization Of A Magnetohydrodynamic Micropump From Polydimethylsiloxane (Pdms), Rachel K. Weber

Graduate Theses - Chemical Engineering

Microfluidics is a growing area of study in recent years, particularly for lab-on-a-chip applications. Fluids must oftentimes be transported from one location on the chip to another. This study focuses on the fabrication and characterization of a magnetohydrodynamic micropump. The device was fabricated in the Rose-Hulman Institute of Technology MiNDS facility, and consisted of a PDMS channel and titanium electrodes supported on a glass slide with a permanent magnet. An Arduino microcontroller capable of pulse width modulation (PWM) was used to control the electrical potential. An electrode design that spanned the full length of the channel was successful in driving ...


Grain Size Effects On Viscoelastic Relaxation Of Sub-Micron Thickness Fcc Metallic Films, Jeffrey Smyth Aug 2018

Grain Size Effects On Viscoelastic Relaxation Of Sub-Micron Thickness Fcc Metallic Films, Jeffrey Smyth

Theses and Dissertations

Sub-micron thickness metallic thin films are known to exhibit mechanical size effects, where the thin film mechanical behavior can differ significantly from that of a bulk version of the same material. One such mechanical behavior, and the focus of this work, is the unique thin film viscoelastic deformation response to sub-yield, low-strain stimuli in near-ambient temperature environments. In engineering components using bulk materials, strains within the elastic regime are generally considered instantaneous. It is only at higher operating temperatures that temporal deformation processes, such as creep, are considered in bulk component design. However, in Micro-Electro-Mechanical Systems (MEMS), specifically Radio Frequency ...


A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian Jul 2018

A Parametric Electrostatic Resonator Using Repulsive Force, Mark Pallay, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

In this paper, parametric excitation of a repulsive force electrostatic resonator is studied. A theoretical model is developed and validated by experimental data. A correspondence of the model to Mathieu's Equation is made to prove the existence and location of parametric resonance. The repulsive force creates a combined response that shows parametric and subharmonic resonance when driven at twice its natural frequency. The resonator can achieve large amplitudes of almost 24 μm and can remain dynamically stable while tapping on the electrode. Because the pull-in instability is eliminated, the beam bounces off after impact instead of sticking to the ...


Iridium Oxide (Iro2) As A Top Electrode For Ferroelectric Micro-Electro-Mechanical Systems (Mems) Devices For Radiation Rich Environments, Manuel Rivas May 2018

Iridium Oxide (Iro2) As A Top Electrode For Ferroelectric Micro-Electro-Mechanical Systems (Mems) Devices For Radiation Rich Environments, Manuel Rivas

Doctoral Dissertations

The multifunctional properties of ferroelectric materials make them ideal components for numerous applications including for extreme environments such as space. Iridium oxide (IrO2) electrodes have been demonstrated to improve the lifetime of ferroelectric memory devices, however little is known about its influence on the electromechanical properties important for ferroelectric microelectromechanical systems (MEMS). The performance of thin film lead zirconate titanate (PZT) based MEMS is affected by the processing conditions, composition, device design, electrode materials, and the environment. This work details the development and characterization of iridium oxide electrodes for PZT based microelectromechanical and pyroelectric-harvesting systems, fabrication induced defects, and design ...


Influence Of Environmental Conditions On The Response Of Mems Resonators, Mohammad H. Hasan May 2018

Influence Of Environmental Conditions On The Response Of Mems Resonators, Mohammad H. Hasan

Mechanical (and Materials) Engineering -- Dissertations, Theses, and Student Research

Micro-electro-mechanical-system (MEMS) devices are increasingly employed in physical systems to fill the growing demand for fast, small, cheap sensors. And with MEMS devices rapidly becoming miniaturized to increase accuracy and reduce response time, analysis of their reliability in different environments is increasingly needed. Furthermore, new sensor designs for applications such as temperature, humidity and pressure sensors, that directly utilize the MEMS interactions within their environments, are growing in demand. In this work, a comprehensive study of the response of MEMS cantilever and clamped-clamped resonators under various environmental conditions is performed in both the linear and nonlinear regimes. The study shows ...


Development Of Microdialysis Probes In Series Approach Toward Eliminating Microdialysis Sampling Calibration: Miniaturization Into A Pdms Microfluidic Device, Randy Espinal Cabrera May 2018

Development Of Microdialysis Probes In Series Approach Toward Eliminating Microdialysis Sampling Calibration: Miniaturization Into A Pdms Microfluidic Device, Randy Espinal Cabrera

Theses and Dissertations

A new microdialysis sampling method and microfluidic device were developed in vitro. The method consisted of using up to four microdialysis sampling probes connected in series to evaluate the relative recovery (RR) of different model solutes methyl orange, fluorescein isothiocyanate (FITC)-dextran average mol. wt. 4,000 (FITC-4), FITC-10, FITC-20, and FITC-40. Different flow rates (0.8, 1.0, and 1.5 µL/min) were used to compare experimentally observed relative recoveries with theoretical estimations. With increasing the number of probes in series, the relative recovery increases and ~100% (99.7% ± 0.9%) relative recovery for methyl orange was obtained ...


Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola Apr 2018

Mems Fabrication Of A Peristaltic Pump, Nicholas Amendola

Journal of the Microelectronic Engineering Conference

From Merriam-Webster dictionary, it states that peristalsis can best be described as "successive waves of involuntary contraction passing along the walls of a hollow muscular structure (such as the esophagus or intestine) and forcing the contents on- ward"[1]. The objective of this project was to create a peristaltic micropump at the Rochester Institute of Technology (RIT) Semiconductor and Microsystem Fabrication Laboratory (SMFL). Using Micro-Electro-Mechanical Systems (MEMS) to create a peristaltic pump to lower the energy used to move a uid through a tube. Using three single micro- machined micro-pumps in a straight line to create this type of action ...


Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang Apr 2018

Design And Fabrication Of A Three-Axis Capacitive Accelerometer, Eddie Huang

Journal of the Microelectronic Engineering Conference

This paper focuses on the design and fabrication of a surface MEMS three-axis accelerometer with comb-drive fingers that measures acceleration up to 10G in the x/y-direction, and 5G in the z-direction on a single device using capacitve sensing. The fabrication process was performed in the Semiconductor and Microsystems Laboratory (SMFL), with a 7 level process flow to achieve the desired features. The accelerometer was designed to have a movable top electrode with sensing fingers attached to it to sense the change in capacitance the x/y-direction and a bottom electrode to sense the change in z-direction. The paper will ...


Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas Feb 2018

Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas

Master's Theses

Micro-electro-mechanical-systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in-situ. Atomic Force Microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored ...


Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li Jan 2018

Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li

Publicly Accessible Penn Dissertations

Microfabricated magnetic MEMS components such as permanent micromagnets and soft magnetic structures are key enablers in various lumped and distributed systems such as energy harvesters, magnetometers, biomagnetic filters, and electromagnetic micromotors. The unique functionalities of such systems often require designers to controllably scale the relevant dimensions of a device relative to the characteristic length of a targeted application. We demonstrate in this dissertation that the developed Microlamination Technology could create two-dimensional uniform- or dual- height monolithic metallic structures with additional deterministic structural and compositional complexities along thickness direction, suitable to facilely and flexibly fabricate both lumped and distributed magnetic MEMS ...


Design And Evaluation Of Novel Attitude Estimation System Using Mems Sensors For Indoor Uas, Joshua Bruce Milam Jan 2018

Design And Evaluation Of Novel Attitude Estimation System Using Mems Sensors For Indoor Uas, Joshua Bruce Milam

Graduate Theses, Dissertations, and Problem Reports

Most small unmanned aerial systems in use today, employ extended Kalman filter sensor fusion algorithms in order to provide accurate estimations of attitude or orientation. These complex algorithms use measurements from GPS receivers and magnetometer sensors that can be rendered useless in GPS denied environments or areas of significant magnetic interference, such as inside buildings or other structures. The complexity of these algorithms makes them inaccessible for some researchers and hobbyists who wish to code their own attitude estimation algorithms. This complexity is also computationally expensive and requires processors that are powerful enough to operate the algorithms along with any ...


Design And Fabrication Of Micro-Pillar Based Piezoresistive Flow Sensors, Adimali Piyadasa Dec 2017

Design And Fabrication Of Micro-Pillar Based Piezoresistive Flow Sensors, Adimali Piyadasa

Doctoral Dissertations

This study is focused on developing a new type of micro-scale gas flow sensors to be used in critical environments such as combustion engines with high pressure high temperature gas flow and integrated micro electro mechanical applications such as lab-on-chip devices. Proposed flow sensor is based on piezoresistivity of Silicon micro column cantilever. Change in resistivity tensor due to gas flow induced stress in the piezoresistive layer results in generating of an output voltage proportional to the gas flow rate in the channel. Current results show that the anisotropic properties of the Silicon can be successfully used in the gas ...