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Design And Fabrication Of A Microelectromechanical Double-Ended Tuning Fork Strain Gauge, Achilleas Bardakas
Design And Fabrication Of A Microelectromechanical Double-Ended Tuning Fork Strain Gauge, Achilleas Bardakas
Open Access Theses
A double-ended tuning fork (DETF) strain gauge that can be used for strain and force measurements is designed and fabricated in this work. The design of the sensor was augmented by an analytical model using the linear beam theory, by numerical simulations performed in COMSOL Multiphysics 5.2 and by an electromechanical state-space model simulated in Matlab. The predicted sensitivity of the gauge was 57.7 Hz/με for the analytical formulation and 49.8 Hz/με for the FEM model. The fabrication of the device was performed at the Birck Nanotechnology Center cleanroom using UV photolithography for metal pad and device layer definition, followed …
Microscale Radiometer Based On The Knudsen Thermal Force, Andrew Strongrich
Microscale Radiometer Based On The Knudsen Thermal Force, Andrew Strongrich
Open Access Theses
Radiometric phenomena arise in non-isothermal rarefied gas flows for which the molecular mean-free path is approximately equal to the characteristic scale of the temperature gradient. The non-equilibrium nature of these flows results in thermal stresses which are capable of exerting forces and moments on immersed structures. When the stresses are established between unequally heated bodies the forces are referred to as Knudsen thermal forces. This work presents the design, fabrication, and characterization of a novel in-plane microscale radiometer capable of both producing and resolving Knudsen forces in low pressures. The current work differs from previous implementations in that both capacitance …
Heat And Mass Transfer Analysis Of A Film Evaporative Mems Tunable Array, William John O'Neill
Heat And Mass Transfer Analysis Of A Film Evaporative Mems Tunable Array, William John O'Neill
Open Access Theses
This thesis details the heat and mass transfer analysis of a MEMs microthruster designed to provide propulsive, attitude control and thermal control capabilities to a cubesat. This thruster is designed to function by retaining water as a propellant and applying resistive heating in order to increase the temperature of the liquid-vapor interface to either increase evaporation or induce boiling to regulate mass flow. The resulting vapor is then expanded out of a diverging nozzle to produce thrust. Because of the low operating pressure and small length scale of this thruster, unique forms of mass transfer analysis such as non-continuum gas …