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High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
High Frequency Thermally Actuated Single Crystalline Silicon Micromechanical Resonators With Piezoresistive Readout, Amir Rahafrooz
Electronic Theses and Dissertations
Over the past decades there has been a great deal of research on developing high frequency micromechanical resonators. As the two most common and conventional MEMS resonators, piezoelectric and electrostatic resonators have been at the center of attention despite having some drawbacks. Piezoelectric resonators provide low impedances that make them compatible with other low impedance electronic components, however they have low quality factors and complicated fabrication processes. In case of electrostatic resonators, they have higher quality factors but the need for smaller transductions gaps complicates their fabrication process and causes squeezed film damping in Air. In addition, the operation of …
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Label-Free Biochemical Recognition Using Mems Resonators For Microarray Technology, Babak Tousifar
Electronic Theses and Dissertations
Highly sensitive biosensors capable of detecting and characterizing smallest quantities of cellular and molecular targets are needed in pharmaceutical and medical diagnostics industries. In this work, the importance of biological target recognition specifically proteins through microarray technologies has been discussed and the most successful tools and techniques have been studied. Moreover, a thermally actuated Micro Electro-Mechanical Systems (MEMS) resonator has been demonstrated and fabricated in this work as an accurate, reliable and low cost biotechnology tool. As a proof of concept, amine to epoxide coupling of octadecylamine to functionalized silicon dioxide surface have been shown through resonator frequency monitoring. The …
Mems Transducer For Hearing Aid Device, Houwen Tang
Mems Transducer For Hearing Aid Device, Houwen Tang
Electronic Theses and Dissertations
A study of implantable middle ear MEMS piezoelectric transducer for hearing aids was developed. The physical vibration deflection at the tip of the transducer is simulated using finite element method. Further, a study of thermoelastic damping effect of four designed MEMS mirrors used as resonators is presented. An optical measurement system based on Mach-Zehnder interferometer is