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In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan
In Situ Investigation Of Thermally Activated Processes Using Mems-Based Devices: Practical Challenges & Applications, Sriram Vijayan
Doctoral Dissertations
In situ heating holders offer the possibility of studying thermally activated processes by performing real time, high temperature experiments inside the transmission electron microscope. The poor thermal stability of traditional furnace-type heating holders limits their use to a narrow range of materials and processes. Modern micro electro mechanical system (MEMS) based heating holders have significantly improved the ability to perform such experiments and have led to a revival in the field of in situ TEM. The excellent thermal stability of the MEMS devices allows us to carry out controlled heating and cooling experiments on both particulate and bulk samples at …
Iridium Oxide (Iro2) As A Top Electrode For Ferroelectric Micro-Electro-Mechanical Systems (Mems) Devices For Radiation Rich Environments, Manuel Rivas
Doctoral Dissertations
The multifunctional properties of ferroelectric materials make them ideal components for numerous applications including for extreme environments such as space. Iridium oxide (IrO2) electrodes have been demonstrated to improve the lifetime of ferroelectric memory devices, however little is known about its influence on the electromechanical properties important for ferroelectric microelectromechanical systems (MEMS). The performance of thin film lead zirconate titanate (PZT) based MEMS is affected by the processing conditions, composition, device design, electrode materials, and the environment. This work details the development and characterization of iridium oxide electrodes for PZT based microelectromechanical and pyroelectric-harvesting systems, fabrication induced defects, and design …
Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas
Nanoscale Mapping Of In-Situ Micro Electro Mechanical Systems With Atomic Force Microscopy, Manuel Rivas
Master's Theses
Micro-electro-mechanical-systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in-situ. Atomic Force Microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored …
Design And Fabrication Of Micro-Pillar Based Piezoresistive Flow Sensors, Adimali Piyadasa
Design And Fabrication Of Micro-Pillar Based Piezoresistive Flow Sensors, Adimali Piyadasa
Doctoral Dissertations
This study is focused on developing a new type of micro-scale gas flow sensors to be used in critical environments such as combustion engines with high pressure high temperature gas flow and integrated micro electro mechanical applications such as lab-on-chip devices. Proposed flow sensor is based on piezoresistivity of Silicon micro column cantilever. Change in resistivity tensor due to gas flow induced stress in the piezoresistive layer results in generating of an output voltage proportional to the gas flow rate in the channel. Current results show that the anisotropic properties of the Silicon can be successfully used in the gas …