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Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick
Mems Variable Area Capacitor For Room Temperature Electrometry, George C. Underwood, Tod V. Laurvick
Faculty Publications
This paper introduces a new way to detect charge using MEMS variable capacitors for extremely sensitive, room temperature electrometry. It is largely based on the electrometers introduced by Riehl et al. [1] except variable capacitance is created by a changing area, not a changing gap. The new scheme will improve MEMS electrometers by eliminating the effects of squeeze-film damping and by theoretically increasing the maximum charge resolution by 70%. The charge conversion gain (the increase in output voltage per input unit charge) for this system is derived. The result show good agreement with MATLAB calculations.
Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi
Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi
Nian X. Sun
This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor Q ≈ 511 and electromechanical coupling coefficient kt² ≈ 1.63%). This first prototype was characterized for different magnetic field levels from 0 to 152 Oe showing a frequency sensitivity of ~ 1 Hz/nT and a limit of detection of ~ 10 nT.
Development Of Mems-Based Corrosion Sensor, Feng Pan
Development Of Mems-Based Corrosion Sensor, Feng Pan
Graduate Theses and Dissertations
This research is to develop a MEMS-based corrosion sensor, which is used for monitoring uniform, galvanic corrosion occurring in infrastructures such as buildings, bridges. The corrosion sensor is made up of the composite of micro/nano metal particles with elastomers. The mechanism of corrosion sensor is based on the mass transport of corrosive species through the sensor matrix. When the metal particles in the matrix corrode, the electrical resistivity of the material increases due to increasing particle resistances or reduction of conducting pathways. The corrosion rate can be monitored by detecting the resistivity change in sensing elements. The life span of …