Digital Commons Network^™

An Improved Thin-Film Microelectrode Array And Signal Conditioning Board For Measuring Cardiac Surface Potentials., Christopher Hayward Osborne

Electronic Theses and Dissertations

The work outlined in this thesis expanded on previous work to improve a thin-film microfabricated electrode array intended for cardiac electrophysiology studies. A thin layer of silver was added in between titanium and platinum electrical trace layers to reduce electrode resistance. A 200 nm layer of silver decreased electrode resistance by an order of magnitude. In addition, a new high quality signal conditioning board was developed using precision operational amplifiers from Texas Instruments. Both new sensor and board design were verified together through in vivo studies using rabbit, goat, and dog hearts.

A Microreactor Approach For Chemoselective Capture And Analysis Of Carbonyl Compounds In Air And Exhaled Breath., Mingxiao Li

Electronic Theses and Dissertations

Detection of volatile organic compounds (VOCs) at trace level (parts per billion volume (ppbv) to parts per trillion (pptv)) has become an important research area because of demanding applications in homeland security, environmental monitoring, and noninvasive diagnosis of diseases. The analysis of trace VOCs challenges existing analytical instruments because their concentrations are beyond current instrument limits of detection. In this dissertation, we have investigated an innovative microreactor that is suitable for quantitative analysis of volatile carbonyl compounds in ambient air as well as in human exhaled breath. The approach is based on microreactor chips fabricated from four inch silicon wafers. …

Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.

AFIT Patents

A novel fabrication process uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. This technique allows the use of positive photomasks with negative resists, opening the door to an ability to create complementary mechanical structures without the fabrication delays and costs associated with having to obtain a negative photomask. In addition, whereas an SU-8 mask would normally be left in place after processing, a technique utilizing a positive photoresist as a release layer has been developed so that the SU-8 masking material can …

Prism - Materials Simulation Tool, Ryan Widjaja, Marisol Koslowski

The Summer Undergraduate Research Fellowship (SURF) Symposium

MEMS (Micro-electromechanical System) is a combined electrical and mechanical nano-scaled device with rapidly growing applications. We have developed a contacting radio frequency capacitive MEMS that is commonly used as capacitive switches and contact actuators in PRISM (Prediction of Reliability, Integrity and Survivability of Microsystems) lab at Purdue University. Our research team has focused on creating a simulation of MEMS’s survivability towards crazing and cracking. Our particular objective in this project is to create a tool that can help users perform complex quantitative calculations regarding the properties of different materials. This tool will generate various plots visualizing the properties, such as …

Simulation Of Beam Dynamics For Mems Devices, Saagar Unadkat, Devon Parkos, Alina Alexeenko

The Summer Undergraduate Research Fellowship (SURF) Symposium

Microelectromechanical Systems (MEMS) are systems made up of small components to complete a bigger goal. Some of these components can be modeled as small beams, which are anchored at both sides, or as cantilever beams. These beams can be subjected to various forces such as Knudsen Forces, Electrostatic Forces as well as G-loading. These devices have many applications such as sensors, actuators and even as accelerometers for airbags, smart phones and game controllers. Modeling the dynamics of these beams is an important task for the MEMS community, consisting of researchers, fabricators, and designers working on one of the many applications …

Mems Resonant Magnetic Field Sensor Based On An Aln/Fegab Bilayer Nano-Plate Resonator, Yu Hui, Tianxiang Nan, Nian Sun, Matteo Rinaldi

Nian X. Sun

This paper reports on the first demonstration of an ultra-miniaturized, high frequency (215 MHz) and high sensitivity MEMS resonant magnetic field sensor based on an AlN/FeGaB bilayer nano-plate resonator capable of detecting magnetic field at nano-Tesla level. Despite of the reduced volume and the high operating frequency of the sensor, high electromechanical performances were achieved (quality factor Q ≈ 511 and electromechanical coupling coefficient kt² ≈ 1.63%). This first prototype was characterized for different magnetic field levels from 0 to 152 Oe showing a frequency sensitivity of ~ 1 Hz/nT and a limit of detection of ~ 10 nT.

Design And Implementation Of A Micro Force Displacement System, Evan Cate

Materials Engineering

The design and implementation of a micro-force displacement system was completed to test various Micro-Electro-Mechanical Systems (MEMS) devices including silicon diaphragms and cantilevers. The system utilizes a World Precision Instruments Fort 10g force transducer attached to a World Precession Instruments TBM4M amplifier. A Keithley 2400 source meter provided data acquisition of the force component of the system. A micro prober tip was utilized as the testing probe attached to the force transducer with a tip radius of 5um. The displacement of samples was measured using a Newport M433 linear stage driven by a Newport ESP300 motion controller (force readings at …

Mechanical Characterization Of Mems Bi-Stable Buckled Diaphragms., Isaac James Phelps

Electronic Theses and Dissertations

Bi-stable buckled MEMS (micro-electromechanical systems) diaphragms have a myriad of uses in the MEMS field for their large out-of-plane deflections. Buckling is a phenomenon brought upon by a compressive stress. Diaphragms are large aspect ratio, circular structures similar to membranes, where the thickness of the diaphragm is much smaller than its diameter. Diaphragms differ from membranes by the amount of bending stiffness. Membranes have negligible bending stiffness and are a common structure analyzed in mechanics of materials, whereas diaphragms have much larger stiffness. Diaphragms were created in the cleanroom by thermally growing silicon dioxide on a silicon wafer. A structural …

Using Micro-Raman Spectroscopy To Assess Mems Si/Sio2 Membranes Exhibiting Negative Spring Constant Behavior, Lavern A. Starman, Ronald A. Coutu Jr.

Electrical and Computer Engineering Faculty Research and Publications

We introduce a novel micro-mechanical structure that exhibits two regions of stable linear positive and negative stiffness. Springs, cantilevers, beams and any other geometry that display an increasing return force that is proportional to the displacement can be considered to have a “Hookean” positive spring constant, or stiffness. Less well known is the opposite characteristic of a reducing return force for a given deflection, or negative stiffness. Unfortunately many simple negative stiffness structures exhibit unstable buckling and require additional moving components during deflection to avoid deforming out of its useful shape. In Micro-Electro-Mechanical Systems (MEMS) devices, buckling caused by stress …

Assessing The Performance Of Digital Micromirror Devices For Use In Space-Based Multi-Object Spectrometers, Kenneth Fourspring

Theses

A current need in space-based instrumentation is a reconfigurable slit mask. Several techniques for slit masks have been employed for ground-based astronomical spectrographs. These ground-based instruments have used large discrete components, which are impractical for remote operation in space-based deployment. The Texas Instruments' Digital Micromirror Device (DMD) was originally conceived purely for display purposes, but is a viable candidate to be use as a slit mask in a space-based multi-object spectrograph (MOS). The Integrated Circuit (IC) manufacturing industry has enabled the robust integration of both silicon transistors and Micro-Electrical Mechanical Systems (MEMS) optical components into a very reliable monolithic chip …

Microfabrication Processes And Advancements In Planar Electrode Ion Traps As Mass Spectrometers, Brett Jacob Hansen

Theses and Dissertations

This dissertation presents advances in the development of planar electrode ion traps. An ion trap is a device that can be used in mass analysis applications. Electrode surfaces create an electric field profile that trap ionized molecules of an analyte. The electric fields can then be manipulated to mass-selectively eject ions out of the trap into a detector. The resulting data can be used to analyze molecular structure and composition of an unknown compound. Conventional ion traps require machined electrode surfaces to form the electric trapping field. This class of electrode presents significant obstacles when attempting to miniaturize ion traps …

Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza

Matteo Rinaldi

A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …

High Performance 3-Folded Symmetric Decoupled Mems Gyroscopes, Hani Hisham Tawfik

Theses and Dissertations

This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict …

Effect Of Hydrodynamic Force On Microcantilever Vibrations: Applications To Liquid-Phase Chemical Sensing, I. Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, O. Brand

Electrical and Computer Engineering Faculty Research and Publications

At the microscale, cantilever vibrations depend not only on the microstructure’s properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever’s vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending …

A 5 Meter Range Non-Planar Cmut Array For Automotive Collision Avoidance, Jonathan Hernandez Aguirre

Electronic Theses and Dissertations

A discretized hyperbolic paraboloid geometry capacitive micromachined ultrasonic transducer (CMUT) array has been designed and fabricated for automotive collision avoidance. The array is designed to operate at 40 kHz, beamwidth of 40° with a maximum sidelobe intensity of -10dB. An SOI based fabrication technology has been used for the 5x5 array with 5 sensing surfaces along each x and y axis and 7 elevation levels. An assembly and packaging technique has been developed to realize the non-planar geometry in a PGA-68 package. A highly accurate mathematical method has been presented for analytical characterization of capacitive micromachined ultrasonic transducers (CMUTs) built …

Toward Sophisticated Controls Of Two-Phase Transport At Micro/Nano-Scale, Fanghao Yang

Theses and Dissertations

Through the use of latent heat evaporating, flow boiling in microchannels offers new opportunities to enable high efficient heat and mass transport for a wide range of emerging applications such as high power electric/electronic/optical cooling, compact heat exchangers and reactors. However, flow boiling in microchannels is hampered by several severe constraints such as bubble confinement (e.g., slug flow), viscosity and surface tension force-dominated flows, which result in unpredictable flow pattern transitions and tend to induce severe flow boiling instabilities (i.e. low-frequency and large magnitude flows) and suppress evaporation and convection.

In this dissertation, three novel micro/nanoscale thermo-fluidic control methodologies were …

Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao

LSU Doctoral Dissertations

Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufacturing at low cost. However, this technology requires precise control of the surface profile of microlenses, which is a major technical challenge. The quality control of the surface profile of microlenses limits their applications. In this dissertation, the surface forming process of the out-of-plane microlenses in UV-lithography fabrication was modeled and simulated using a simplified cellular automata model. The microlens array was …

Piezoelectric-Based, Self-Sustaining Artificial Cochlea, Jared Evans

Browse all Theses and Dissertations

Hearing loss is a prevalent issue, affecting all ages in innumerable occupations. Cochlear implants are one solution to sensorineural hearing complications; and though they are commonly used, the electronic devices have limitations in power consumption and external equipment. Piezoelectric films emulate the relationship between the basilar membrane and inner hair cell structures of the human cochlear epithelium, inducing a potential difference in response to sound pressure. Through proper MEMS fabrication and material selection, an artificial cochlear can be developed utilizing piezoelectrics, which is self-sustainable and functions naturally with the mechanisms of the human ear. This research investigates the feasibility of …

Integration Of Memristors With Mems For Dynamic Displacement Control, Sergio Fabian Almeida Loya

Open Access Theses & Dissertations

In recent years the demand for high-speed, lower power consumption and large-capacity non-volatile memories has increased. Promisingly the memristor can be used due to its special characteristic of having memory through resistance change. The memristor behavior is not limited to digital applications but it can be used in analog application as well including: memristors in chaotic circuits, amoeba's learning, neural synaptic emulation, reprogrammable and reconfigurable circuits, and for neuromorphic computers. On the other hand Micro Electro Mechanical Systems (MEMS) are small scale structures that can interact with the physical world due to their mechanical properties. These devices are widely used …

Influence Of Fluid-Structure Interaction On Microcantilever Vibrations: Applications To Rheological Fluid Measurement And Chemical Detection, Isabelle Dufour, E. Lemaire, B. Caillard, H. Debeda, C. Lucat, Stephen M. Heinrich, Fabien Josse, Oliver Brand

Civil and Environmental Engineering Faculty Research and Publications

At the microscale, cantilever vibrations depend not only on the microstructure’s properties and geometry but also on the properties of the surrounding medium. In fact, when a microcantilever vibrates in a fluid, the fluid offers resistance to the motion of the beam. The study of the influence of the hydrodynamic force on the microcantilever’s vibrational spectrum can be used to either (1) optimize the use of microcantilevers for chemical detection in liquid media or (2) extract the mechanical properties of the fluid. The classical method for application (1) in gas is to operate the microcantilever in the dynamic transverse bending …