Digital Commons Network^™

Dyed Resist Study, Jennifer L. Dunbar

Journal of the Microelectronic Engineering Conference

Dyed and undyed AZ1512 series resists were characterized for exposure latitude, development rate, and reduction of both notching and standing waves. Uniform and patterned oxidized silicon wafers were coated with aluminum and employed as substrates for all phases of the experiment. The results show that the addition of a dye provided for the reduction of standing waves and an increase in exposure latitude. The control of reflective notching was not verified as collected data proved inconclusive.

Reactive Ion Etching Of Aluminum On The Plasmatrac 2406, Asadd M. Hosein

Journal of the Microelectronic Engineering Conference

~ process for etching aluminum was developed for a Plasmatrac 2406 Reactive Ion Etcher. The etch gases used were a mixture of silicon tetrachioride (SiC14) and helium (He). ~ SiC14 flow of 35 sccm and He flow of 48 sccm at a chamber pressure of 100 mT and power of 150 watts resulted in an average aluminum etch rate of 1450 Angstroms per minute. Resulting selectivities ratios were 3.2:1 for aluminum to resist, and 30:1 for aluminum to the underlying oxide. The etch uniformity was approximately 27~ and etching of aluminum lines less than 2 microns resulted in an anisotropic …

The Effects Of Premetalization Clean On Electromigration In Al-Si Thin Films On Si02 And Polysilicon Substrates, Peter R. Stubler

Journal of the Microelectronic Engineering Conference

The effects of premetalization cleaning on electromigration in Al-Si thin films was studied. Premetalization cleaning, divided into a standard RCA clean, DC glow discharge plasma clean, and no clean, were performed on oxide and polysilicon substrates Test structures were subjected to high current densities of 10e6 A/cm2 and monitored for changes in current resulting from electromigration induced defects. The test station employed in this experiment was subject to current losses which the 5Oftware erroneously interpreted as electromigration failures, thus completing the test.

Design And Fabrication Of A Pn Junction Photodiode Array, Richard Rogoff

Journal of the Microelectronic Engineering Conference

An array of photodiodes consisting of various areas and/or metallization schemes were fabricated for use in a photodiode array. The two gate metals used were Aluminum and Aluminum/Ytterbium. The standard RIT PMOS process was modified to obtain a shallow junction depth for the photodiode. All the diodes generated a photocurrent when illuminated, but the Aluminum metal scheme produced better results due to higher open circuit voltages and short circuit currents. The fill factor was also much better on these diodes.

Multilevel Metallization At Rit, Manuel N. Carneiro

Journal of the Microelectronic Engineering Conference

This project was a preliminary study of an aluminum/dielectric/aluminum multilayer metallizatiOn scheme. Polyimide and spin on glass were compared using high frequency CV analysis on fabricated capacitors. The simple processing involved showed that good crack-free and adhesive fil s could be formed with both materials although the polyimide was the more ideal CV characteristics. Test masks were generated to measure via resistance and dielectric breakdown in a bi-level structure. The Spin on Glass processing was unsuccessful because of underetching of vias. The polyimide processing was successful displaying good breakdown characteristics but high via resistances.

Summary Of Experimental Bridge Features, Theodore Hopwood Ii, James H. Havens, Edgar E. Courtney

Kentucky Transportation Center Research Report

Experimental bridge features and service problems investigated during this study are reviewed. Those were epoxy-coated reinforcing steel, stay-in-place forms, experimental deck features (rotary compaction and broomed deck finishing), precast segmental bridges, steel-corrosion control methods (weathering steel and hot-dipped galvanizing), microsilica concrete, failures of masonry coatings, and failures of aluminum guardrail-retaining nuts.

Several features including latex and low-slump overlays, epoxycoated reinforcing steel, and broomed deck finishes (for state-built bridges), are now in common use. Most of the other experimental bridge features were performing satisfactorily. A corrosion problem was observed on one weathering steel bridge. Analyses of failures of masonry coatings and …

Growth Of Anodic Al2O3 Films, Bruce Parmelee

Journal of the Microelectronic Engineering Conference

The anodic oxidation of Aluminum (Al), which is a low temperature process, was used to form an aluminum oxide (Al₂O₃) film for use as an insulating layer. The anodization was done in a diluted, approximately 10% by volume, sulferic acid solution (H₂SO₄). Constant anodization voltages of 10, 15, and 20 volts, were maintained to obtain layers of Al₂O₃ ranging in thickness and refractive index from 3375-4077A and 1.46-1.95 receptively.

Modal Analysis Of A Cantilever Plate, Ohseop Song

Theses

This thesis discusses the vibration of a thin, flat cantilever aluminum plate. Results are based on both an analytical finite element method using the ANSYS program and an experimental analysis using a digital Fast Fourier Transform (FFT) analyzer. The FFT analyzer permits extraction of modal parameters (natural frequency, damping, mode shape) for the plate.

Aging Characteristics Of Aluminum-Silver Alloys, Paul Leray Reynolds

Retrospective Theses and Dissertations

The effect of single-step and two-step aging treatments on the tensile properties of an Al-6 wt. % Ag alloy and an Al-14 wt. % Ag alloy has been investigated. Results show that the tensile properties of these alloys were approximately the same whether they were given single or two-step aging treatments. Reversion treatments applied to the fully age-hardened Al-14 % Ag alloy after 15 minutes at various temperatures between 200 and 350 °C showed two maxima in the ultimate tensile strength and the yield strength. It is believed that this result was caused by two transformation processes occurring simultaneously: i.e., …

Determination Of Effective Strain For The Strainhardening Of Aluminum Subjected To Completely Reversed Strain Combinations, Navin M. Patani

Theses and Dissertations

It is known that subrecrystallization plastic deformation increases the strength of a metal. The amount of strengthening that may be acquired can be approximated using a strainhardening equation and a simple given strain. The purpose of this thesis was to determine the effective strain for predicting strainhardening for annealed aluminum subjected to completely reversed strain combinations.

The Enrichment Of Hydro-Carbon Fuel By Aluminum Powder In An Open-Hearth Furnace, Rick Sung-Tao Lee

Theses and Dissertations

The objective of this thesis was to study theoretically the enrichment of hydrocarbon fuels with aluminum powder for an open-hearth furnace.

Growth Of A Preferentially Oriented Aluminum Single Crystal, John George Bjeletich

Bachelors Theses and Reports, 1928 - 1970

When studying some anisotropic property of a specific metal, such as the critical shear stress of aluminum, it is desirable that the test specimen be a single crystal with the crystal axes preferentially oriented. Therefore, it is necessary to obtain a single crystal by one of the methods mentioned and by use of x-rays to determine the orientation. Once the single crystal is obtained and the orientation known, it is possible to grow a preferentially oriented aluminum single crystal by a method generally known as "seeding". The purpose of this thesis problem was to grow a crystal by utilizing the …

Stress-Induced Martensite Transformation In An Alloy Of The Copper-Aluminum-Nickel System, Gary D. Alexander

Bachelors Theses and Reports, 1928 - 1970

It was intended that the alloy be thoroughly investigated for martensite transformation that would make the alloy "super-elastic," but due to the many difficulties that arose this was not possible. Attempts to grow a single crystal from the cast alloy were not successful because of the difficulties that were encountered with the Kanthal resistance furnace (referred to later). Consequently, the growing of the single crystal was abandoned and the alloy was tested in the poly-crystalline form.

The Zone-Refining Of Aluminum With Copper As The Major Impurity, Arlan Edward Rathke, Russell E. Hoar

Bachelors Theses and Reports, 1928 - 1970

The purpose of this paper is to report on the investigation of the possibility of removing impurities from the two important light metals, aluminum and magnesium, by applying the principles of zone-refining. The impurities in these metals are namely iron, silicon, and copper, which is the main impurity. Copper and iron come from the reduction cells, while silicon is introduced during the preparation of the material for the reduction bath.

The Zone-Refining Of Aluminum And Magnesium With Copper As The Major Impurity, Russell E. Hoar

Bachelors Theses and Reports, 1928 - 1970

The purpose of this paper is to report on the investigation of the possibility of removing impurities from the two important light metals, aluminum and magnesium, by applying the principles of zone-refining. The impurities in these metals are namely iron, silicon, and copper, which is the main impurity. Copper and iron come from the reduction cells, while silicon is introduced during the preparation of the material for the reduction bath.

The Construction And Operation Of A Universal Specimen Mount With Protective Lead Shield For The Purpose Of Determining Pole Figures Using The Schulz-Decker Transmission Technique, Richard L. Fausner

Bachelors Theses and Reports, 1928 - 1970

It was the purpose of this study to construct a universal mount, to construct a protective lead shield, to operate the instrument, and to provide a pole figure using the transmission method of Schulz and Decker. There are at present several lengthy x-ray methods of determining the grain orientation of metals. These methods are mainly photographic. In order to provide a rapid means of obtaining the necessary information concerning the grain orientation of a metal, a universal mount was constructed.

The Effect Of Germanium On The Current Efficiency In The Electrolysis Of Pure Zinc Sulfate Solution, Keith R. Bock

Bachelors Theses and Reports, 1928 - 1970

It has long been recognized that electrolytic zinc cells are extremely sensitive to impurities. In fact, cer­tain impurities present in amounts as low as 0.1 mg/1 cause a serious loss of current efficiency. Also, the presence of several impurities in the electrolyte may accelerate the detrimental effect of each impurity.

Recrystallization Of High Purity Aluminum, Virgil H. Griswold Jr.

Bachelors Theses and Reports, 1928 - 1970

If a metal is first cold-worked and then heated to a sufficient temperature for an adequate length of time, the hardening properties due to cold-working disappear, and the metal will return more or less to its original state. Upon examination of the microstructure, we find that new grains have replaced the old grains through what is called recrystallization. The final size of the recrystallized grains depends upon three important variables--the degree of cold-work or deforma­tion, annealing temperature, and annealing time.

The Effect Of Manganese On The Age Hardening Of Aluminum-Copper Alloys, Keith P. Burgess

Bachelors Theses and Reports, 1928 - 1970

It is known that age-hardening occurs in alloys of the solid solution type containing a hardening constituent, of a metal or metallic compound which is more soluble in the solvent phase at higher tempertures than at lower temperatures.

The Metallography Of Aluminum Casting Alloys, Donald D. Goehler

Bachelors Theses and Reports, 1928 - 1970

The purpose of this thesis is to supply the Montana School of Mines with an up to date source of information concerning the metallography of aluminum casting alloys. This thesis is designed as a continuing project. Ultimately, it is hoped that a catalog containing all the typical structures of aluminum casting alloys will develop.

The Age-Hardening Of Aluminum With Mgzn2, Sidney E. Worthen

Bachelors Theses and Reports, 1928 - 1970

The purpose of this thesis is to investigate the age-hardening of aluminum with magnesium and zinc in such proportions as to conform to the compound MgZn₂.

Because of a lack of time and proper equipment, the only property investigated was the hardness as indicated by the Rockwell Superficial Hardness Tester.

The Age Hardening Of Silver With Copper-Silicide, Joseph Edward Shaw

Bachelors Theses and Reports, 1928 - 1970

The successful application of the phenomenon of pre­cipitation hardening to aluminum and copper has indicated the possibility of hardening all metals in the same way. The phenomenon of age hardening was discoveredin 1911, and since that time much research has been car­ried on in all parts of the world on various alloy sys­tems.

Structure Of Eutectics, Dilip K. Das

Bachelors Theses and Reports, 1928 - 1970

The present paper is a result of work done on the study of structures of eutectics of a certain eutectic-forming binary systems. In this research work no systems with intermetallic compounds have been studied.

The Electroplating Of Cadmium From Sulfate Solutions, Lewis S. Prater

Bachelors Theses and Reports, 1928 - 1970

It has been proven that cadmium forms a very satisfactory plate on steel, which has to withstand severe corrosion, especially the corrosion of sea water and spray. The metal is now successfully plated electrolytically from cyanide solutions, but wherever work is carried on with cyanide, there is great danger of poisoning to the workers.

The Electrolytic Deposition Of Chromium Upon Aluminum, E. Fults, L. D. Voerge

Bachelors Theses and Reports, 1928 - 1970

The purpose or this investigation is primarily to determine the best conditions for plating chromium on aluminum. The work was carried out with the hope of obtaining coherent deposits, and of determin­ing the conditions under which such deposits may be duplicated.