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Biomems Wireless Pressure Sensor, Daniel V. Pearce

Journal of the Microelectronic Engineering Conference

A design and manufacture of a wireless pressure sensor was proposed as a future tool for use in biological monitoring. This device is designed to acquire pressure changes through a change in capacitance. This is accomplished using a large circular parallel plate capacitor separated by a micron of air. The upper and lower plates are connected together via a large planar inductor on the opposite end of the device. The inductor and capacitor in a parallel form a resonant circuit with resonant frequency equal to one over the square root of inductance times capacitance. The resonant frequency can be dependent …