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Interface Characteristics Of Vertically Aligned Carbon Nanofibers For Interconnect Applications, Yusuke Ominami, Quoc Ngo, Makoto Suzuki, Alexander J. Austin, Cary Y. Yang, Alan M. Cassell, Jun Li
Interface Characteristics Of Vertically Aligned Carbon Nanofibers For Interconnect Applications, Yusuke Ominami, Quoc Ngo, Makoto Suzuki, Alexander J. Austin, Cary Y. Yang, Alan M. Cassell, Jun Li
Electrical and Computer Engineering
The authors characterize the detailed interface structure of Ni-catalyzed vertically aligned carbon nanofibers (CNFs) prepared by plasma-enhanced chemical vapor deposition for interconnect applications. Stacked graphitic layers and cup-shape structures of CNFs around the interface region have been observed using high-resolution scanning transmission electron microscopy. The interaction between the Ni catalyst and Ti layer dramatically affects the CNF structure during initial growth. The effect of interface nanostructures on contact resistance is also discussed.
Bright Contrast Imaging Of Carbon Nanofiber-Substrate Interface, Makoto Suzuki, Hirohiko Kitsuki, Quoc Ngo, Cary Y. Yang
Bright Contrast Imaging Of Carbon Nanofiber-Substrate Interface, Makoto Suzuki, Hirohiko Kitsuki, Quoc Ngo, Cary Y. Yang
Electrical and Computer Engineering
We present the contrast mechanisms of scanning electron microscopy (SEM) for visualizing the interface between carbon nanofibers (CNFs) and the underlying substrate. SEM imaging with electron beam energies higher than a certain threshold provides different image contrasts depending on whether CNFs are in contact with the substrate or suspended above the substrate. CNFs with diameters ranging from 25to250nm are examined with various electron beam energies. It is found that the threshold energy corresponds to the energy required to penetrate the CNF and its dependence on CNF diameter can be understood using the theory of electron range. This knowledge will be …