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Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam
Investigating Mems Devices In Flow Conditions Relevant To Flow-Through Systems., Mohammad Shafquatul Islam
Electronic Theses and Dissertations
Advancements in microscale actuating technologies has substantially expanded the possibilities of interacting with the surrounding environment. Microstructures that deflect in response to mechanical forces are one of the largest application areas of microelectromechanical systems (MEMS). MEMS devices, functioning as sensors, actuators, and support structures, find applications in inertial sensors, pressure sensors, chemical sensors, and robotics, among others. Driven by the critical role of catalytic membrane reactors, this dissertation aims to evaluate enzyme activity on polymeric membranes and explore how fabrication methods from the field of Electrical and Computer Engineering (ECE) can incorporate sensing and actuation into these porous surfaces. Toward …
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Gursel Alici
The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Gordon Wallace
The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza
Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza
Matteo Rinaldi
In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The …
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza
Matteo Rinaldi
A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical …
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Response Characterization Of Electroactive Polymers As Mechanical Sensors, G. Alici, Geoffrey M. Spinks, J. D. Madden, Y. Wu, G G. Wallace
Faculty of Engineering - Papers (Archive)
The characterization of the dynamic response (including transfer function identification) of trilayer polypyrrole (PPy) type conducting polymer sensors is presented. The sensor was built like a cantilever beam with the free end stimulated through a mechanical lever system, which provided displacement inputs. The voltage generated and current passing between the two outer PPy layers as a result of the input was measured to model the output/input behavior of the sensors based on their experimental current/displacement and voltage/displacement frequency responses. We specifically targeted the low-frequency behavior of the sensor as it is a relatively slowsystem. Experimental transfer function models were generated …