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Ignition Of A Plasma Discharge Inside An Electrodeless Chamber: Methods And Characteristics, Mounir Laroussi
Ignition Of A Plasma Discharge Inside An Electrodeless Chamber: Methods And Characteristics, Mounir Laroussi
Electrical & Computer Engineering Faculty Publications
In this paper the generation and diagnostics of a reduced pressure (300 mTorr to 3 Torr) plasma generated inside an electrodeless containment vessel/chamber are presented. The plasma is ignited by a guided ionization wave emitted by a low temperature pulsed plasma jet. The diagnostics techniques include Intensified Charge Coupled Device (ICCD) imaging, emission spectroscopy, and Langmuir probe. The reduced-pressure discharge parameters measured are the magnitude of the electric field, the plasma electron number density and temperature, and discharge expansion speed.