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Parametric Resonance Of A Repulsive Force Mems Electrostatic Mirror, Mehmet Ozdogan, Meysam Daeichin, Abdallah H. Ramini, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We investigate the nonlinear dynamic behavior of an electrostatic MEMS mirror. The MEMS mirror is driven by repulsive force actuators, which avoid pull-in instability and enable large travel ranges. In parallel-plate actuators, the force on the structure is toward the substrate limiting the range of motion to the capacitor gap. Unlike parallel-plate, repulsive force actuators push the mirror away from the substrate not limiting the motion. The highly nonlinear nature of the repulsive force and the large motions create unique characteristics that dier from parallel-plate actuators. Repulsive force actuators show linear natural frequency hardening with increased DC voltages unlike parallel-plate …