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Investigating Fabrication Methods For Micro Single-Chamber Solid Oxide Fuel Cells, Man Yang

Dissertations

A Solid Oxide Fuel Cell (SOFC) is a green energy technology that offers a cleaner and efficient alternative to fossil fuels. The efficiency and utility of SOFCs can be enhanced by fabricating miniaturized component structures within the fuel cell footprint. This research focuses on the microfabrication of parallel-connected inter-digitized design of micro single chamber SOFC (μ-SC-SOFCs). In this dissertation, candidate micro/nano fabrication techniques to precisely fabricate micro patterns on planar substrates have been studied. These include EBL, soft lithography, photolithography, and direct-writing. After analyzing preliminary results, two combinational approaches were further investigated. The first method involves the combination of the …