Engineering Commons^™

Cfd Simulation Of Contact Planarization, Shanti Vusirikala

Masters Theses

"Semiconductor devices form the essential components of most electronic devices. The fabrication of circuit elements to manufacture these devices is done by a process known as photolithography, using photoresist layer deposition, optical masks, and etching. As feature sizes become smaller, higher optical precision is required, necessitating an optically flat surface on the photoresist layer. The surface of the photoresist layer can become uneven because of conformation to the topography of the layers underneath or a change in shape of the layer after evaporation of solvent. To combat this, Brewer Science, Inc. has developed a contact planarization process (CON-TACT®) in which …