Physics Commons^™

Propagation Of Rayleigh Waves In Thin Films, Agus A. Ananda

Dissertations, Theses, and Masters Projects

With the advent of thin film technology and more recently its applications in microelectronics and control of surface properties, the interest in mechanical properties of thin films has grown tremendously. Mechanical defects such as creep, fracture and adhesion loss, play a very important role in physical instabilities of thin film materials. An acoustic microscope has been built to study mechanical properties of thin-films. The microscope operates at a nominal frequency of 50 MHz. Rayleigh surface waves velocities on the surface of film-substrate systems were measured from V(z) curves generated by the acoustic microscope. V(z) curves are produced from interference between …