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Physics Faculty Publications and Presentations

1984

Plasma and Beam Physics

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Computer Simulations Of Submicron Fib System Optics, W. Thompson, I. Honjo, Mark Utlaut Jan 1984

Computer Simulations Of Submicron Fib System Optics, W. Thompson, I. Honjo, Mark Utlaut

Physics Faculty Publications and Presentations

The design of the optical elements for a focused ion beam (FIB) system having a 50 mm spot size over a 1 mm square field requires extensive computational analysis. We discuss the mathematical techniques applied to the components of interest in this submicron FIB system; the electrostatic lenses, the mass analyzer, and the electrostatic deflectors. The results of ion trajectory calculations predicted for the whole FIB column by the computer code snow are presented. The aberration coefficients to third order and a parametric study of a stigmatic Wien filter whose design includes entrance and exit fringe field effects will be ...