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Nanometrology Device Standards For Scanning Probe Mmicroscopes And Processes For Their Fabrication And Use, Peter Moeck
Nanometrology Device Standards For Scanning Probe Mmicroscopes And Processes For Their Fabrication And Use, Peter Moeck
Physics Faculty Publications and Presentations
Nanometrology device standards and methods for fabricating and using such devices in conjunction With scanning probe microscopes are described. The fabrication methods comprise: (1) epitaxial growth that produces nanometer sized islands of knoWn morphology, structural, morphological and chemical stability in typical nanometrology environments, and large height-to-width nano-island aspect ratios, and (2) marking suitable crystallographic directions on the device for alignment With a scanning direction.