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Condensed Matter Physics

Deposition

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Continuum Model Of Thin-Film Deposition And Growth, Andrew J. Bernoff, Seth Lichter Jan 1989

Continuum Model Of Thin-Film Deposition And Growth, Andrew J. Bernoff, Seth Lichter

All HMC Faculty Publications and Research

A continuum theory for the deposition and growth of solid films is presented. The theory is developed in a coordinate-independent manner and so incorporates the fully nonlinear physics. The evolution of the film is modeled in three steps. First, the adsorption of atoms in the incident beam is modeled as a ballistic process. Second, the random motion of the adatoms is treated as a diffusive process. Finally, sticking of adatoms to the film occurs as a Poisson process. The resulting system of differential equations is examined in several parameter limits. The diffusively dominated limit appears similar to zone 1 of ...