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Harmonic Sputtering Theory, Zhu Lin Zhang
Harmonic Sputtering Theory, Zhu Lin Zhang
Wayne State University Dissertations
ABSTRACT
HARMONIC SPUTTERING THEORY
By
ZHU LIN ZHANG
February 2010
Advisor: Dr. Karur R. Padmanabhan
Major: Physics
Degree: Doctor of Philosophy
Based on the standard Botzmann equation in Classical Statistics Mechanics, we have derived a variety of Linear Transport Equations appeared in Sputtering Theory for a random, infinite multi-components medium. The pertinent relations among these Linear Transport Equations have been studied in detail. We have introduced exact classical scattering cross-sections of power potential interaction collision into these Transport Equations and solved them asymptotically by using Laplace Transformation for both isotropic term and anisotropic term. A pool of analytical asymptotic solutions …