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Iowa State University

Microelectronics

Mechanical Engineering

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Full-Text Articles in Physics

Modeling, Characterization And Integration Of Thin Film Resonator Microsensors , Jie Xia Jan 1996

Modeling, Characterization And Integration Of Thin Film Resonator Microsensors , Jie Xia

Retrospective Theses and Dissertations

There is an increasing demand by using smart and miniaturized microsensors and microtransducers in the areas of automobile, environment Science and analytical chemistry. Thin film microresonators (TFRs), meriting from their small size, higher sensitivity and compatibility with VLSI process, have being investigated as microsensors. Gas or vapor absorbed species, or contacted liquids may perturb resonator mechanical, electrical and piezoelectric properties. In this dissertation, a coupled wave theory is presented and applied to analyze acoustic wave propagation phenomena both in TFR-solid and TFR-liquid phases. A two-dimensional analysis is implemented to compare with a one-dimensional model and experimental results. The analysis and ...


Characterization And Analysis Of Viscoelastically Loaded Thin Film Piezoelectric Resonators Incorporated In An Oscillator Microsensing System , Ronald Patrick O'Toole Jan 1994

Characterization And Analysis Of Viscoelastically Loaded Thin Film Piezoelectric Resonators Incorporated In An Oscillator Microsensing System , Ronald Patrick O'Toole

Retrospective Theses and Dissertations

In the recent advancement of piezoelectric resonator technology, there has been a large growth in the application of these devices for chemical sensing. These sensors operate by detecting changes in their environment which perturb the electrical - acoustic operation and in turn can be harnessed by means of supporting electronics and signal processing to monitor various processes. Examples include remote environmental monitoring, chemical process control, and commercial gas phase detectors. In this dissertation, the chemical sensing theory and properties of piezoelectric resonators such as the bulk-acoustic wave thin-film resonator (TFR) and the quartz crystal microbalance (QCM) are developed. This analysis concentrates ...


Acoustically Driven Integrated Microstrip Antennas And Electromagnetic Radiation From Piezoelectric Devices , Charles Forrest Campbell Jan 1993

Acoustically Driven Integrated Microstrip Antennas And Electromagnetic Radiation From Piezoelectric Devices , Charles Forrest Campbell

Retrospective Theses and Dissertations

For a receiver system to be considered integrated, the antenna and electronics need to be fabricated on a single semiconductor wafer. To avoid EMI problems, the circuitry must somehow be shielded from the environment where the antenna resides. The required shielding may be accomplished by separating the antenna on one side of the wafer from the electronics on the other side with a conducting ground plane. Energy may be acoustically coupled from the antenna to the circuitry through the ground plane via thin film piezoelectric transducers on either side of the wafer. The radiating side of the wafer would then ...