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Design And Simulation Of A Miniature Cylindrical Mirror Auger Electron Energy Analyzer With Secondary Electron Noise Suppression, Jay A. Bieber
Design And Simulation Of A Miniature Cylindrical Mirror Auger Electron Energy Analyzer With Secondary Electron Noise Suppression, Jay A. Bieber
USF Tampa Graduate Theses and Dissertations
In the nanoscale metrology industry, there is a need for low-cost instruments, which have the ability to probe the structrure and elemental composition of thin films. This dissertation, describes the research performed to design and simulate a miniature Cylindrical Mirror Analyzer, (CMA), and Auger Electron Spectrometer, (AES). The CMA includes an integrated coaxial thermionic electron source. Electron optics simulations were performed using the Finite Element Method, (FEM), software COMSOL. To address the large Secondary Electron, (SE), noise, inherent in AES spectra, this research also included experiments to create structures in materials, which were intended to suppress SE backgound noise in …