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Design, Analysis, And Optimization Of Diffractive Optical Elements Under High Numerical Aperture Focusing, Toufic Jabbour
Electronic Theses and Dissertations
The demand for high optical resolution has brought researchers to explore the use of beam shaping diffractive optical elements (DOEs) for improving performance of high numerical aperture (NA) optical systems. DOEs can be designed to modulate the amplitude, phase and/or polarization of a laser beam such that it focuses into a targeted irradiance distribution, or point spread function (PSF). The focused PSF can be reshaped in both the transverse focal plane and along the optical axis. Optical lithography, microscopy and direct laser writing are but a few of the many applications in which a properly designed DOE can significantly ...