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Surface Debye Temperature Measurement With Reflection High-Energy Electron Diffraction, H. E. Elsayed-Ali
Electrical & Computer Engineering Faculty Publications
Measurement of the surface mean-square atomic vibrational amplitude, or equivalently the surface Debye temperature, with reflection high-energy electron diffraction is discussed. Low-index surfaces of lead are used as examples. Particular details are given about the temperature-dependent diffraction pattern of Pb(100) in the Debye-Waller region. The use of reflection high-energy electron diffraction for measurement of the substrate surface temperature in thin-film deposition chambers is suggested. © 1996 American Institute of Physics.