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Design, Fabrication, And Characterization Of Multilayer Hyperbolic Metamaterials, James Dilts

Graduate Theses - Physics and Optical Engineering

Hyperbolic metamaterials (HMMs) show extreme anisotropy, acting as metals and dielectrics along orthogonal directions. They are designed using the effective medium theory (EMT) and can be fabricated using standard semiconductor processing techniques. Current techniques used to characterize the optical behavior of HMMs have a high complexity or are unable to robustly determine the complex permittivity tensor. We describe the details of a procedure to obtain a very low mean-squared-error (MSE) for extraction of permittivity from hyperbolic metamaterials using spectroscopic ellipsometry. We have verified our procedure by fabricating three different samples of various materials and fill factors designed to have a …