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Operations Research, Systems Engineering and Industrial Engineering Commons™
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Articles 1 - 4 of 4
Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering
Evaluation Of Scheduling Strategies On The Performance Of A Flexible Manufacturing Cell:A Simulation Study, Amr Arisha, Paul Young, Mohie El Baradie
Evaluation Of Scheduling Strategies On The Performance Of A Flexible Manufacturing Cell:A Simulation Study, Amr Arisha, Paul Young, Mohie El Baradie
Conference papers
The current trend in semiconductor manufacturing is characterized by expanding product variety, decreasing lead times from order to delivery, exacting standards of quality, and competitive prices. One possible means of achieving this is in the form of increased flexibility. Providing flexibility is typically an expensive proposition so, industrial engineers aim to provide more economic approaches to enable flexible manufacturing cells and related equipment to operate appropriately in an efficient manner. It is essential to characterize these tools in detail before the production plans are finalized. Using state-of-the-art computer simulation, a generic model of photolithography tools has been developed. The model …
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
Articles
The pressures on semiconductor manufacturers due to cost considerations, rapid growth of process technology, quality constraints, feature size reduction, and increasingly complex products are requiring ever higher efficiency from manufacturing facilities. The complexity of manufacturing high capacity semiconductor devices means that it is impossible to analyze the process control parameters and the production configurations using traditional analytical models. There is, therefore, an increasing need for effective models of each manufacturing process, characterizing and analyzing the process in detail, allowing the effect of changes in the production environment on the process to be predicted. The photolithography process is one of the …
Simulation Activity Diagrams, John Ryan, Cathal Heavey
Simulation Activity Diagrams, John Ryan, Cathal Heavey
Conference papers
This paper presents a technique, Simulation Activity Diagrams (SAD), developed to lessen the modelling burden during the initial requirements gathering phases of a simulation project. The technique also allows the capture and visual communication of detailed information, to manufacturing personnel, which may otherwise be lost in detailed programming code.
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
Conference papers
The pressures on semiconductor manufacturers due to cost considerations, rapid growth of process technology, quality constraints, feature size reduction, and increasingly complex devices are increasing requiring ever higher efficiency from the manufacturing facilities. The complexity of manufacturing high capacity semiconductor devices means that it is impossible to analyze the process control parameters and the production configurations using traditional analytical models. There is, therefore, an increasing need for effective models of each manufacturing process, characterising and analyzing the process in detail, allowing the effect of changes in the production environment on the process to be predicted. The photolithography process is one …