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Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering

Measuring The Need For Manufacturing Flexibility And Evaluating Its Economic Benefits, Navin Karwande Dec 1996

Measuring The Need For Manufacturing Flexibility And Evaluating Its Economic Benefits, Navin Karwande

Theses

Flexible systems are known of enabling organizations to take advantage of diversified products, low volume production items with short life-cycles. They also improve the ability to respond to market changes. Flexibility has thus become a strategic manufacturing need in recent years.

Because of the high initial capital outlay involved, the selection of the appropriate flexible solution has become a critical issue. This thesis proposes a methodology to determine the most cost effective and feasible flexibility strategy. A flexibility audit is developed to analyze and evaluate the changes taking place in a facility's environment. These changes and a measurement scheme ...


Design, Simulation And Fabrication Of A Mems In-Situ Contactless Sensor To Detect Plasma Induced Damage During Reactive Ion Etching, Subramanian Ganesh Dec 1996

Design, Simulation And Fabrication Of A Mems In-Situ Contactless Sensor To Detect Plasma Induced Damage During Reactive Ion Etching, Subramanian Ganesh

Theses

The present trend in the semiconductor industry is towards submicron devices. An inevitable process technique in achieving this is by reactive ion etching of the polysilicon gate. During RIE, the gate oxide may get damaged due to several causes. One of the main causes of the damage is the non-uniformity of the plasma. It is reported that these plasma inconsistencies are mainly due to electrode design and that they create spatial plasma potential fluctuation. These fluctuations are reported to be in the range of 10-20 Volts. By providing an in-situ monitoring of the wafers, the reliability of the device could ...