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Operations Research, Systems Engineering and Industrial Engineering Commons

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Mechanical Engineering

2011

Boron implantation

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Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering

Effects Of Boron Implantation In Films Of Iron-Nickel, J. Ryu, K. Castell, W. Nowak, C. Vittoria Jun 2011

Effects Of Boron Implantation In Films Of Iron-Nickel, J. Ryu, K. Castell, W. Nowak, C. Vittoria

Carmine Vittoria

We have implanted boron ions into films of Fe-Ni alloy composition. A homogeneous distribution of boron was determined from the sputter Auger analysis with a concentration of 18% and 34% for low- and high-dose implantation, respectively. The resistivity of film was increased by a factor of 2 and 4 as a result of low- and high-dose implantation, respectively. The magnetic properties of these films are studied as a function of annealing temperature by using FMR measurements. Both the uniaxial anisotropy field and FMR linewidth are dramatically decreased as a result of annealing at elevated temperatures. The changes of effective magnetization ...