Nuclear Engineering Commons^™

Ion Beam Sputtering Yield Measurements By Quartz Crystal Microbalance, Norris W. Watkins Ii, Kaitlyn Grundy, Ahmed Hassanein, Theodore J. Novakowski, Al-Montaser Ba Al-Ajlony, Mark Catalfano, Sivanandan Harilal

The Summer Undergraduate Research Fellowship (SURF) Symposium

Quartz-crystal microbalance (QCM) has been used as a sensitive device for the measurement of small mass changes for a long ago. In fact, using QCM we can measure the differential sputtering yield profile of a material, over a hemisphere above the target, very precisely. The sputtering yield depends on properties of both the incident ions (energy, mass, and incidence angle) and the target (mass, surface binding energy, surface topography, and even the crystal orientation). In our present study, we used a highly sensitive QCM to detect the mass change of the electrode material (gold and silver) through oscillations and calculated …