Open Access. Powered by Scholars. Published by Universities.®

Nanoscience and Nanotechnology Commons

Open Access. Powered by Scholars. Published by Universities.®

Plasmonics

2013

Graduate Theses and Dissertations

Articles 1 - 1 of 1

Full-Text Articles in Nanoscience and Nanotechnology

Plasmonics Based Micro/Nano Manufacturing, Quincy Jay Garner Jan 2013

Plasmonics Based Micro/Nano Manufacturing, Quincy Jay Garner

Graduate Theses and Dissertations

Since the advent of the Information Age, there has been an ever growing demand to continually shrink and reduce the cost of semiconductor products. To meet this demand, a great amount of research has been done to improve our current micro/nano manufacturing processes and develop the next generation of semiconductor fabrication techniques. High throughput, low cost, smaller features, high repeatability, and the simplification of the manufacturing processes are all targets that researchers continually strive for. To this day, there are no perfect systems capable of simultaneously achieving all of these targets. For this reason, much research time is spent ...