Nanoscience and Nanotechnology Commons^™

Advanced Purification And Direct-Write 3d Nanoprinting Via Focused Electron Beam Induced Deposition, Brett Bloxton Lewis

Doctoral Dissertations

This dissertation addresses three difficulties with focused electron beam induced deposition preventing broader application; purity, spatial control, and mechanical characterization.

Focused electron beam induced deposition (FEBID) has many advantages as a nanoscale fabrication tool. It is compatible for implementation into current lithographic techniques and has the potential to direct-write in a single step nanostructures of a high degree of complexity. FEBID is a very versatile tool capable of fabricating structures of many different compositions ranging from insulating oxides to conducting metals.

Due to the complexity of the technique and the difficulty in directly measuring many important variables, FEBID has remained …