Nanoscience and Nanotechnology Commons^™

Nanopillar Array With A Λ/11 Diameter Fabricated By A Kind Of Visible Cw Laser Direct Lithography System, Chen Zhang, K. Wang, J. Bai, S. Wang, W. Zhao, F. Yang, C. Gu, Guiren Wang

Faculty Publications

Nanoscale functional structures are indispensable elements in many fields of modern science. In this paper, nanopillar array with a pillar diameter far smaller than Abbe's diffraction limit is realized by a new kind of continuous wave (CW) laser direct lithography technology. With atomic force microscopy technology, the average diameter of nanopillars on thin OIR906 photoresist film is about 65 nm and the smallest diameter is 48 nm, which is about 1/11 of the incident laser wavelength. Also, the influences of coma and astigmatism effects to the shape and size of nanopillar are numerically simulated by utilizing vector integral. As far …