Nanoscience and Nanotechnology Commons^™

A Comparative Study Of The Dry And Wet Nano-Scale Electro-Machining, M. P. Jahan, K. R. Virwani, Kamlakar P. Rajurkar, A. P. Malshe

Department of Mechanical and Materials Engineering: Faculty Publications

In recent years, a nano-electromachining (nano-EM) process based on a scanning tunneling microscope (STM) platform has been demonstrated. Nano-EM is capable of machining nano-features, under both, liquid dielectric (wet nano-EM) and air dielectric (dry nano-EM) media. The objective of this paper is to present a comparative study between the wet and dry nano-EM processes based on process mechanism, machining performance, consistency and dimensional repeatability of these two processes. The comparison of the two processes has been conducted at near field nano-EM, where the gap between the tool electrode and workpiece is 2 nm and the machining is performed at room …