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Full-Text Articles in Nanoscience and Nanotechnology
Galvanic Porous Silicon: Processing And Characterization For Nanoenergetics, Collin R. Becker
Mechanical Engineering Graduate Theses & Dissertations
Porous silicon (PS) is a silicon (Si) based material composed of pores with diameters ranging from several nanometers to several micrometers. Typically PS is formed by electrochemically etching a Si wafer in a hydrofluoric acid (HF) based electrolyte. This route requires a custom built etch cell and a power supply and is difficult to integrate with the batch processing techniques of conventional Microsystems fabrication. In the first part of this work, a galvanic etching approach is used to fabricate PS in which neither a power supply nor custom etch cell are required. Galvanic etching methods are developed to fabricate thick ...