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Generalized Ellipsometry On Sculptured Thin Films Made By Glancing Angle Deposition, Daniel Schmidt

Department of Electrical and Computer Engineering: Dissertations, Theses, and Student Research

In this thesis, physical properties of highly optically and magnetically anisotropic metal sculptured thin films made by glancing angle deposition are presented. Predominantly, the determination of optical and magneto-optical properties with spectroscopic generalized Mueller matrix ellipsometry and homogenization approaches is discussed. Nomenclatures are proposed to unambiguously identify the sculptured thin film geometry.

Generalized ellipsometry, a non-destructive optical characterization technique, is employed to determine geometrical structure and anisotropic dielectric properties of highly spatially coherent three-dimensionally nanostructured thin films in the spectral range from 400 to 1700 nm. The analysis of metal slanted columnar thin films (F1-STFs) deposited at glancing angle ( …