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Full-Text Articles in Nanoscience and Nanotechnology
Atomic Layer Deposition Enabled Interconnect And Packaging Technologies For As-Grown Nanowire Devices, Jen-Hau Cheng
Mechanical Engineering Graduate Theses & Dissertations
Nanowires (NWs) have attracted considerable interests in many applications due to their small size, extremely high surface-to-volume ratio, and superior material properties. They are promising material candidates as fundamental building blocks for future electronic, optoelectronic, energy, sensor, and biomedical applications. The majority of research activities have focused on the synthesis of NWs. With the advent of high-performance NWs, interconnect and packaging of NWs are becoming increasingly important for device applications. Vertical NW array devices, compared with horizontal NW configurations, are of great importance for achieving ultra-high integration density at the device level without the need of additional assembly and rearrangement ...