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2010

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Full-Text Articles in Nanoscience and Nanotechnology

Generalized Ellipsometry On Sculptured Thin Films Made By Glancing Angle Deposition, Daniel Schmidt Dec 2010

Generalized Ellipsometry On Sculptured Thin Films Made By Glancing Angle Deposition, Daniel Schmidt

Department of Electrical and Computer Engineering: Dissertations, Theses, and Student Research

In this thesis, physical properties of highly optically and magnetically anisotropic metal sculptured thin films made by glancing angle deposition are presented. Predominantly, the determination of optical and magneto-optical properties with spectroscopic generalized Mueller matrix ellipsometry and homogenization approaches is discussed. Nomenclatures are proposed to unambiguously identify the sculptured thin film geometry.

Generalized ellipsometry, a non-destructive optical characterization technique, is employed to determine geometrical structure and anisotropic dielectric properties of highly spatially coherent three-dimensionally nanostructured thin films in the spectral range from 400 to 1700 nm. The analysis of metal slanted columnar thin films (F1-STFs) deposited at glancing angle ( …


Photoelectrochemical Properties Of N,S,And Cl Modified Nano Tio_2 Thin Films, Hong Yun, Chang-Jian Lin, Jing Li, Rong-Gui Du Nov 2010

Photoelectrochemical Properties Of N,S,And Cl Modified Nano Tio_2 Thin Films, Hong Yun, Chang-Jian Lin, Jing Li, Rong-Gui Du

Journal of Electrochemistry

The nitrogen(N),sulfur(S) and chlorine(Cl) modified nano TiO2 thin films were prepared by adding Ti(O-n-Bu)4 as the precursor into concentrated HNO3,H2SO4 and HCl Solutions,respectively,on different substrates in a sol-gel process.The photoelectrochemical performances of N,S and Cl modified nano TiO2 thin films have been studied by UV-vis(DRS),photocurrent curves,EIS and OCP-time curves.N-modified TiO2 nano films show better surface structure,which helps to improve the quantum efficiency of nano TiO2 thin films.


Closing The Gap Between The Industry And Higher Education Institutions- Case Examples From East African Region, Deogratias Harorimana Mr Nov 2010

Closing The Gap Between The Industry And Higher Education Institutions- Case Examples From East African Region, Deogratias Harorimana Mr

Dr Deogratias Harorimana

Much complained about is the quality of graduates Universities put on the labour market. Less talked about however is why knowledge institutions seems to be bad knowledge managers. In this presentation I argue that DIRECT collaborative relationship between Industry,Governments and Higher Education Institutions is a per-requisite.Good relationship is key to building such a successful knowledge transfer strategies between Industries and Educational and Research Institutions. This paper explores what makes a good Knowledge Transfer Partnership Strategy and highlights some key lessons for businesses, Universities and Government bodies. This paper was a Key note presentation to the Annual International Conference on Building …


Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza Sep 2010

Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.


Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chnegjie Zuo, Gianluca Piazza Sep 2010

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chnegjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) super high frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …


Studies Of Oxidation Processes Of Adsorbed And Solution Co On Pt(110) Electrode By Cyclic Voltammetry And In Situ Ftirs, Li Tian, Jun-Tao Li, Jin-Yu Ye, Chun-Hua Zhen, Shi-Gang Sun Aug 2010

Studies Of Oxidation Processes Of Adsorbed And Solution Co On Pt(110) Electrode By Cyclic Voltammetry And In Situ Ftirs, Li Tian, Jun-Tao Li, Jin-Yu Ye, Chun-Hua Zhen, Shi-Gang Sun

Journal of Electrochemistry

The oxidation processes of adsorbed CO (COad) and solution phase CO (COsol) on Pt(110) electrode were investigated by cyclic voltammetry and in-situ FTIR spectroscopy. It has revealed that in comparison with COad on Pt(110) in a CO-free solution,the oxidation current peak of COsol in a CO-saturated solution is positively shifted ca. 168 mV,and the peak current density has been increased by 6. 70 times. Linear adsorbed CO (COL) is determined by in-situ FTIR spectroscopy as the main species,which is uniformly distributed on Pt (110) surface. In a CO-free solution,the onset potential of COL is measured by in-situ FTIRS ca. 0. …


In Situ Surface-Enhanced Raman Scattering Spectroscopic Study Of Sulfur Adsorption On Polycrystalline Platinum Electrode Surface, Bolian Xu-, In-Su Park, Ying Li, De-Jun Chen, Yuye J. Tong Aug 2010

In Situ Surface-Enhanced Raman Scattering Spectroscopic Study Of Sulfur Adsorption On Polycrystalline Platinum Electrode Surface, Bolian Xu-, In-Su Park, Ying Li, De-Jun Chen, Yuye J. Tong

Journal of Electrochemistry

The paper reports the first in situ surface enhanced Raman scattering (SERS) spectroelectrochemistry study of sulfur adsorption and electro-oxidation on highly roughened polycrystalline Pt surface in both acidic and basic supporting electrolytes. The SERS spectra were taken at a constant electrode potential after accumulative electro-oxidation CVs of the Pt electrode with pre-adsorbed sulfur species and at different electrode potentials that were varied stepwise of the Pt electrode immersed in sulfur-containing electrolytes without pre-adsorbed sulfur species. In both cases,a dominant vibrational band at 299 cm -1 in acidic electrolyte but at 310 cm-1 in basic electrolyte was observed,which was assigned to …


Comparative Study Of Nanoporous Pt,Ptru And Ptruir Catalysts Using Electrochemical Ftir Spectroscopy, M. Amussen Robert, Holt-Hindle Peter, Nigro Samantha, Chen Aicheng Aug 2010

Comparative Study Of Nanoporous Pt,Ptru And Ptruir Catalysts Using Electrochemical Ftir Spectroscopy, M. Amussen Robert, Holt-Hindle Peter, Nigro Samantha, Chen Aicheng

Journal of Electrochemistry

In recent years much effort has been put towards developing efficient Pt-based electrocatalysts for applications in fuel cells. With the rising cost of precious metals such as Pt,the need to enhance the activity and to decrease the load of catalysts is prominent. Herein we report on the synthesis and comparative study of nanoporous Pt,PtRu and PtRuIr electrocatalysts. The nanoporous electrodes were fabricated using a hydrothermal method and characterized by scanning electron microscopy (SEM) ,energy dispersive spectroscopy (EDS) ,X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) . The electrocatalytic activity of the fabricated nanopo- rous materials was evaluated using both CO …


An In Situ Fourier Transform Infrared Spectroelectrochemical Study On Alcohols Electrocatalytic Oxidation At Pd Electrode In Acidic Solution, Hai-Ping Huang, Lian-Qin Wang, Pei-Kang Shen Aug 2010

An In Situ Fourier Transform Infrared Spectroelectrochemical Study On Alcohols Electrocatalytic Oxidation At Pd Electrode In Acidic Solution, Hai-Ping Huang, Lian-Qin Wang, Pei-Kang Shen

Journal of Electrochemistry

The methanol and ethylene glycol electrooxidation on palladium electrode in acidic solution has been investigated by cyclic voltammetry and in situ Fourier transform infrared spectroelectrochemistry. It shows that the oxidation of methanol and ethylene glycol at Pd electrode cannot proceed until over 1. 5 V in acidic and neutral media. The overpotential decreases and the peak current density increases with the reduction in pH values. The formation of the oxygen-containing species significantly affects the alcohol oxidation on Pd electrode. The in situ FTIR spectroscopic measurements show that the oxidation products of ethylene glycol on Pd electrode are CO2 and oxalic …


Fabrication, Characterization And Simulation Of Non-Lithographic Nanostructures And Their Potential Applications, Neelanjan Bhattacharya Aug 2010

Fabrication, Characterization And Simulation Of Non-Lithographic Nanostructures And Their Potential Applications, Neelanjan Bhattacharya

UNLV Theses, Dissertations, Professional Papers, and Capstones

The dissertation describes the formation of porous silicon through the pores of porous alumina on a silicon substrate. Porous silicon, by itself, is inherently a non-uniform material that has non-uniform optical and electronic properties. In addition, it is also mechanically fragile material requiring careful material handling. The porous silicon fabricated through the nanosized pores of porous alumina are expected to mitigate these problems, thereby enhancing commercial viability of the device. The porous silicon as well the porous alumina have been synthesized through anodisation for various parameters and also various types of anodizing electrolytes. The porous silicon, so obtained have been …


Effect Of Particle Properties And Light Polarization On The Plasmonic Resonances In Metallic Nanoparticles, U. Guler, R. Turan Jul 2010

Effect Of Particle Properties And Light Polarization On The Plasmonic Resonances In Metallic Nanoparticles, U. Guler, R. Turan

U. Guler

The resonance behavior of localized surface plasmons in silver and gold nanoparticles was studied in the visible and near-infrared regions of the electromagnetic spectrum. Arrays of nano-sized gold (Au) and silver (Ag) particles with different properties were produced with electron-beam lithography technique over glass substrates. The effect of the particle size, shape variations, period, thickness, metal type, substrate type and sulfidation were studied via transmission and reflectance measurements. The results are compared with the theoretical calculations based on the DDA simulations performed by software developed in this study. We propose a new intensity modulation technique based on localized surface plasmons …


The Applications And Limitations Of Printable Batteries, Matthew Delmanowski Jun 2010

The Applications And Limitations Of Printable Batteries, Matthew Delmanowski

Graphic Communication

This study focuses on the potential applications for printed batteries and how they could affect the printing industry. It also analyzes the main problems associated with manufacturing this technology and what needs to be done to overcome these issues. To find the answers to these questions, two methods of research were used. The first was through the elite and specialized interviewing of Dr. Scott Williams of Rochester Institute of Technology and Professor Nancy Cullins from Cal Poly. The second form of research was a common, yet useful, method called secondary research. This entailed looking at recent written research papers about …


Enhanced Light Extraction Efficiency From Gan Light Emitting Diodes Using Photonic Crystal Grating Structures, Simeon S. Trieu Jun 2010

Enhanced Light Extraction Efficiency From Gan Light Emitting Diodes Using Photonic Crystal Grating Structures, Simeon S. Trieu

Master's Theses

Gallium nitride (GaN) light emitting diodes (LED) embody a large field of research that aims to replace inefficient, conventional light sources with LEDs that have lower power, higher luminosity, and longer lifetime. This thesis presents an international collaboration effort between the State Key Laboratory for Mesoscopic Physics in Peking University (PKU) of Beijing, China and the Electrical Engineering Department of California Polytechnic State University, San Luis Obispo. Over the course of 2 years, Cal Poly’s side has simulated GaN LEDs within the pure blue wavelength spectrum (460nm), focusing specifically on the effects of reflection gratings, transmission gratings, top and bottom …


Nano/Micro-Structured Electrode Materials For Lithium-Ion Batteries, Yu-Guo Guo, Zhong-Li Wang, Xing-Long Wu, Wei-Ming Zhang, Li-Jun Wan May 2010

Nano/Micro-Structured Electrode Materials For Lithium-Ion Batteries, Yu-Guo Guo, Zhong-Li Wang, Xing-Long Wu, Wei-Ming Zhang, Li-Jun Wan

Journal of Electrochemistry

Nanostructured materials are currently of interest as high performance anodes and cathodes for rechargeable lithium-ion batteries because of their novel nano-size effects and significantly enhanced kinetics. This review paper describes some recent developments in this field,addressing the size effects,morphology effects,as well as the functions of carbon coating layers toward lithium storage. Several"kinetically stabilized"nano/microstructured electrode materials and high-rate electrode materials with mixed-conducting networks based on the work of the authors are highlighted for illustration.


Prerapation And Supercapacitor Property Of Mesoporous Carbon Nanofibers, Yong-Wen Wang, Ming-Bo Zheng, Jian Cao, Jie-Ming Cao, Guang-Bin Ji, Jie Tao May 2010

Prerapation And Supercapacitor Property Of Mesoporous Carbon Nanofibers, Yong-Wen Wang, Ming-Bo Zheng, Jian Cao, Jie-Ming Cao, Guang-Bin Ji, Jie Tao

Journal of Electrochemistry

Two different mesoporous carbon nanofibers with large mesopore or core-shell structure were prepared by using the resol/F127 mixture to fill the AAO template. The morphology and structural parameters of the samples were characterized by SEM,TEM,and N2 adsorption-desorption analysis. The supercapacitive behaviors of the electrodes were tested by cyclic voltammetry and galvanostatic charge-discharge. The results show that the specific capacitances of mesoporous carbon nanofibers increased obviously and the fine supercapacitive performances were achieved at high scan rate or large current density.


Nano-Sized Au On Nickel Foam As Cathode Of Alkaline Al-H_2o_2 Semi Fuel Cell, Shu-Li Chen, Bang-An Lu, Yao Liu, Gui-Ling Wang, Dian-Xue Cao May 2010

Nano-Sized Au On Nickel Foam As Cathode Of Alkaline Al-H_2o_2 Semi Fuel Cell, Shu-Li Chen, Bang-An Lu, Yao Liu, Gui-Ling Wang, Dian-Xue Cao

Journal of Electrochemistry

Nano-sized Au particles were deposited on a nickel foam substrate by a fast spontaneous deposition method using AuCl3 as the source of Au. The effects of AuCl3 concentration and deposition time on the size and distribution of Au particles,and the performance of the obtained Au/Ni electrode as the cathode of Al-H2O2 semi fuel cell were investigated. It was found that after the nickel foam was immersed in a 2 mmol·L-1 AuCl3 solution for 60 s,Au particles with diameters smaller than 100 nm were deposited on its surfaces and cover the surface completely. The Al-H2O2 semi fuel cell with Au/Ni cathode …


Electrocatalytic Oxidation Of Hcooh At Au_(Core)-Pd_(Shell)-Pt_(Cluster) Nanocubes, Qing-Ning Jiang, Huan Li, Ning Yang, Ping-Ping Fang, Feng-Ru Fan, Zhong-Qun Tian May 2010

Electrocatalytic Oxidation Of Hcooh At Au_(Core)-Pd_(Shell)-Pt_(Cluster) Nanocubes, Qing-Ning Jiang, Huan Li, Ning Yang, Ping-Ping Fang, Feng-Ru Fan, Zhong-Qun Tian

Journal of Electrochemistry

Gold nanocubes were synthesized by a two-step seed-mediated growth method. The Aucore-Pdshell and Aucore-Pdshell-Ptcluster nanocubes with controllable shell thickness of Pd and cluster coverage of Pt were synthesized by simply changing the amount ratio of H2PdCl4 or H2PtCl6. The samples were characterized by scanning electron microscope ( SEM) 、transmission electron microscopc ( TEM) and cyclic voltammetry ( CV) . CV was then used to make a systematic study on the dependence of the electrocatalytic properties on the shell thickness of Aucore-Pdshell and Pt coverage of Aucore-Pdshell-Ptcluster,respectively. The results indicated that the Au nanocube core coated by three atomic layers of …


Rwanda National Customer Satisfaction Survey: Results And Conclusions, Deogratias Harorimana Mar 2010

Rwanda National Customer Satisfaction Survey: Results And Conclusions, Deogratias Harorimana

Dr Deogratias Harorimana

It can be said that development practice requires more than financial and manpower inputs. Rwanda, in 1994 suffered a Genocide. The Society,collectively and under the leadership of His Excellence Paul Kagame the current elected President of Rwanda came together and designed strategies that would propel Rwanda to a Middle-Income, Private Sector Led Economy by the Year 2020.

In 2009, a client seating in one of the Hotels in a Suburb of Remera, in Kigali City, complained about poor service delivery he was experiencing from the waitress staff.Using his Blackberry message, the client forwarded an email to some of the RDB …


Electrocatalytic Reduction Of L-Cystine At Pb/Nanotio_2 Film Electrode, Dao-Bao Chu, Feng Wang, Ying Xiao, Xue-Jiao Zhang Feb 2010

Electrocatalytic Reduction Of L-Cystine At Pb/Nanotio_2 Film Electrode, Dao-Bao Chu, Feng Wang, Ying Xiao, Xue-Jiao Zhang

Journal of Electrochemistry

The nanoporous Ti-based TiO2 films electrodes modified with Pb particles(Pb/nanoTiO2) were prepared by using anodization and potentiostatic electro-deposition.The optimum deposition conditions were determined by comparing with various deposition potentials and time.The SEM analyses indicated that the TiO2 films were homogeneous nanoporous structure,and the Pb particles well dispersed on the TiO2 films.The L-cystine electrocatalytic activity reduction on the Pb/nanoTiO2 film electrodes was investigated by cyclic voltammetry and Chronoamperometric curves.The results showed that this type of the electrode posseses high acticity and stability.


Preparation And Electrochemical Behavior Of Li_4ti_5o_(12) Nanosheets As Anode Material For Lithium Ion Battery, Yi-Fei Wang, Yu-Feng Tang, Zheng Qiu, Li Yang Feb 2010

Preparation And Electrochemical Behavior Of Li_4ti_5o_(12) Nanosheets As Anode Material For Lithium Ion Battery, Yi-Fei Wang, Yu-Feng Tang, Zheng Qiu, Li Yang

Journal of Electrochemistry

Spinel lithium titanate(Li4Ti5O12) nanosheets with a size range of 200 ~400 nm were synthesized by hydrothermal process from the amorphous hydrous titanium oxide precursors.The as-prepared products were characterized by X-ray powder diffraction(XRD),scanning electron microscopy(SEM) and transmission electron microscopy(TEM).The electrochemical behaviors of Li4Ti5O12 electrode in conventional organic electrolyte and ionic liquid electrolyte were investigated by using cyclic voltammetry,galvanostatic charge-discharge and AC impedance techniques.The experimental results indicate that the as-prepared nanostructured Li4Ti5O12,evaluated as anode material,exhibited good reversibility and cycle performance.It is expected to be a potential anode material for commerical battery applications.


Enterprise Development Policies And Capacity-Building In Science, Technology And Innovation (Sti)-Response To The Issue Note, Deogratias Harorimana Jan 2010

Enterprise Development Policies And Capacity-Building In Science, Technology And Innovation (Sti)-Response To The Issue Note, Deogratias Harorimana

Dr Deogratias Harorimana

Enterprise Development, Investment and Business Climate are all important for economic growth. But what policies, strategies are needed to make economic growth a reality. The author has followed one of the World's fastest reformer and emerging nation in the Heart of Africa-Rwanda. The paper shares lessons and practical aspects related to building an entrepreneurial population, and building a government which is a facilitator of business climate


Survey Report On Training And Spending On Customer Care Services, Deogratias Harorimana Sr Jan 2010

Survey Report On Training And Spending On Customer Care Services, Deogratias Harorimana Sr

Dr Deogratias Harorimana

In a bid to promote and develop good customer care service in various sectors of Rwandan economy, a survey was conducted to assess progress and trends on customer service capacity building. Although shortcomings are there, there have been efforts and registered trends across the country on service delivery front. Investment in Capacity Building IS happening in certain sectors but this is unevenly distributed. In 2008 companies had started recognizing the significance of good service and cultivate a good working environment and training. From 2009, there was a decline in investment in capacity building in front office and key service delivery …


Theory Of ‘Selectivity’ Of Label-Free Nanobiosensors – A Geometro-Physical Perspective, Pradeep R. Nair, Muhammad A. Alam Jan 2010

Theory Of ‘Selectivity’ Of Label-Free Nanobiosensors – A Geometro-Physical Perspective, Pradeep R. Nair, Muhammad A. Alam

Birck and NCN Publications

Modern label-free biosensors are generally far more sensitive and require orders of magnitude less incubation time compared to their classical counterparts. However, a more important characteristic regarding the viability of this technology for applications in Genomics/Proteomics is defined by the ‘Selectivity’, i.e., the ability to concurrently and uniquely detect multiple target biomolecules in the presence of interfering species. Currently, there is no theory of Selectivity that allows optimization of competing factors and there are few experiments to probe this problem systematically. In this article, we use the elementary considerations of surface exclusion, diffusion limited transport, and void distribution function to …


Giant Raman Enhancement On Nanoporous Gold Film By Conjugating With Nanoparticles For Single-Molecule Detection, Lihua Qian, Biswajit Das, Yan Li, Zhilin Yang Jan 2010

Giant Raman Enhancement On Nanoporous Gold Film By Conjugating With Nanoparticles For Single-Molecule Detection, Lihua Qian, Biswajit Das, Yan Li, Zhilin Yang

Electrical & Computer Engineering Faculty Research

Hot spots have the contradictively geometrical requirements for both the narrowest interstices to provide strong near-field coupling, and sufficient space to allow entrance of the analytes. Herein, a two-step method is employed to create hot spots within hybrid nanostructures, which consist of self-supported nanoporous gold films with the absorbed probes and subsequent nanoparticle conjugates without surface agents or mechanical motion. The molecules confined into 1 nm interstice exhibit 2.9 × 107 times enhancement in Raman scattering compared to pure nanoporous gold. Giant enhancement primarily results from strong near-field coupling between nanopore and nanoparticle, which is theoretically confirmed by finite-difference …


On The Effect Of Hydrodynamic Slip On The Polarization Of A Nonconducting Spherical Particle In An Alternating Electric Field, Hui Zhao Jan 2010

On The Effect Of Hydrodynamic Slip On The Polarization Of A Nonconducting Spherical Particle In An Alternating Electric Field, Hui Zhao

Mechanical Engineering Faculty Research

The polarization of a charged, dielectric, spherical particle with a hydrodynamically slipping surface under the influence of a uniform alternating electric field is studied by solving the standard model (the Poisson–Nernst–Planck equations). The dipole moment characterizing the strength of the polarization is computed as a function of the double layer thickness, the electric field frequency, the particle’s surface charge, and the slip length. Our studies reveal that two processes contribute to the dipole moment: ion transport inside the double layer driven by the electric field and the particle’s electrophoretic motion. The hydrodynamic slip will simultaneously impact both processes. In the …


Nano-Scaled Fet Device For Cmos Technology, Prabhat Ranjan Pathak Jan 2010

Nano-Scaled Fet Device For Cmos Technology, Prabhat Ranjan Pathak

Dissertations

In this work the 3-D structure of the Accumulation mode (ACM) and Enhance mode (ECM) FinFET was developed by the Taurus-Device Editor. The design of both ACM and ECM FinFET was optimized for high-performance IC applications to meet ITRS specification for Ioff current, for 9nm gate length. The design of ACM and ECM FinFET is optimized, analyzed and compared against each other with respect to Darin Induced Barrier Lower (DIBL), Sub-threshold Swing(SS), operation and performance characteristics with varying electrical and physical parameters Silicon thickness (Tsi), Source/Drain doping gradient (σsd), electrical channel length (Leff ), …


A Study Of Reticle Non-Flatness Induced Image Placement Error In Extreme Ultraviolet Lithography, Sudharshanan Raghunathan Jan 2010

A Study Of Reticle Non-Flatness Induced Image Placement Error In Extreme Ultraviolet Lithography, Sudharshanan Raghunathan

Legacy Theses & Dissertations (2009 - 2024)

As the semiconductor industry continues scaling devices to smaller sizes, the need for next generation lithography technology for fabricating these small structures has always been at the forefront. Over the past few years, conventional optical lithography technology which has adopted a series of resolution enhancement techniques to support the scaling needs is expected to run out of steam in the near future. Extreme Ultra Violet lithography (EUVL) is being actively pursued by the semiconductor industry as one of the most promising next generation lithographic technologies. Most of the issues unique to EUVL arise from the use of 13.5 nm light …


Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Dec 2009

Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of thin-film (250 nm) super-high-frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contour-extensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt2, in excess of 1.5%. These devices are employed to synthesize …