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Full-Text Articles in Nanoscience and Nanotechnology

Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani Feb 2019

Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani

Doctoral Dissertations

This work presents a novel counter-flow design for thermal stabilization of microfluidic thermal reactors. In these reactors, precise control of temperature of the liquid sample is achieved by moving the liquid sample through the thermal zones established ideally through the conduction in the solid material of the device. The goal here is to establish a linear thermal distribution when there is no flow and to minimize the temperature change at flow condition. External convection as well as internal flowinduced effects influence the prescribed thermal distribution. The counter-flow thermal gradient device developed in this study is capable of both stabilizing the ...


Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra Dec 2018

Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra

Electronic Theses and Dissertations

We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers ...


Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li Jan 2018

Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li

Publicly Accessible Penn Dissertations

Microfabricated magnetic MEMS components such as permanent micromagnets and soft magnetic structures are key enablers in various lumped and distributed systems such as energy harvesters, magnetometers, biomagnetic filters, and electromagnetic micromotors. The unique functionalities of such systems often require designers to controllably scale the relevant dimensions of a device relative to the characteristic length of a targeted application. We demonstrate in this dissertation that the developed Microlamination Technology could create two-dimensional uniform- or dual- height monolithic metallic structures with additional deterministic structural and compositional complexities along thickness direction, suitable to facilely and flexibly fabricate both lumped and distributed magnetic MEMS ...


Mems Tunable Infrared Metamaterial And Mechanical Sensors, Qiugu Wang Jan 2017

Mems Tunable Infrared Metamaterial And Mechanical Sensors, Qiugu Wang

Graduate Theses and Dissertations

Sub-wavelength resonant structures open the path for fine controlling the near-field at the nanoscale dimension. They constitute into macroscopic “metamaterials” with macroscale properties such as transmission, reflection, and absorption being tailored to exhibit a particular electromagnetic response. The properties of the resonators are often fixed at the time of fabrication wherein the tunability is demanding to overcome fabrication tolerances and afford fast signal processing. Hybridizing dynamic components such as optically active medium into the device makes tunable devices. Microelectromechanical systems (MEMS) compatible integrated circuit fabrication process is a promising platform that can be merged with photonics or novel 2D materials ...


Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower Oct 2014

Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower

Doctoral Dissertations

Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices. Silicon resonators have poor noise and temperature performance (due to its linear temperature versus frequency coefficient). At the moment the only advantage that silicon resonators have over quartz crystal resonators is a small form factor. The photolithography processing method currently being used in industry is a very tedious task, requiring multiple etching ...


Fabrication Of Magnetic Two-Dimensional And Three-Dimensional Microstructures For Microfluidics And Microrobotics Applications, Hui Li Jan 2014

Fabrication Of Magnetic Two-Dimensional And Three-Dimensional Microstructures For Microfluidics And Microrobotics Applications, Hui Li

Theses and Dissertations--Mechanical Engineering

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing ...


Integration Of Memristors With Mems For Dynamic Displacement Control, Sergio Fabian Almeida Loya Jan 2013

Integration Of Memristors With Mems For Dynamic Displacement Control, Sergio Fabian Almeida Loya

Open Access Theses & Dissertations

In recent years the demand for high-speed, lower power consumption and large-capacity non-volatile memories has increased. Promisingly the memristor can be used due to its special characteristic of having memory through resistance change. The memristor behavior is not limited to digital applications but it can be used in analog application as well including: memristors in chaotic circuits, amoeba's learning, neural synaptic emulation, reprogrammable and reconfigurable circuits, and for neuromorphic computers. On the other hand Micro Electro Mechanical Systems (MEMS) are small scale structures that can interact with the physical world due to their mechanical properties. These devices are widely ...


Galvanic Porous Silicon: Processing And Characterization For Nanoenergetics, Collin R. Becker Jan 2010

Galvanic Porous Silicon: Processing And Characterization For Nanoenergetics, Collin R. Becker

Mechanical Engineering Graduate Theses & Dissertations

Porous silicon (PS) is a silicon (Si) based material composed of pores with diameters ranging from several nanometers to several micrometers. Typically PS is formed by electrochemically etching a Si wafer in a hydrofluoric acid (HF) based electrolyte. This route requires a custom built etch cell and a power supply and is difficult to integrate with the batch processing techniques of conventional Microsystems fabrication. In the first part of this work, a galvanic etching approach is used to fabricate PS in which neither a power supply nor custom etch cell are required. Galvanic etching methods are developed to fabricate thick ...


Nanomaterial Characterization Using Actuated Microelectromechanical Testing Stages, Joseph James Brown Jan 2010

Nanomaterial Characterization Using Actuated Microelectromechanical Testing Stages, Joseph James Brown

Mechanical Engineering Graduate Theses & Dissertations

In this work, microfabricated mechanical systems have been created in a variety of forms and operated to perform nanomaterials characterization tests. A simplified integrated test system was developed and used to collect data from a range of materials including gallium nitride nanowires. A new force estimation approach was developed which enables estimation of the forces provided by electrothermal microelectromechanical (MEMS) actuators, and with knowledge of a material specimen cross-section area, an estimation of the engineering stress within the nanomaterial specimen.

In an expanded design, a MEMS micromanipulator probe interfaced with a removable specimen holder, also known as a test coupon ...


Characterization Of A Viscoelastic Response From Thin Metal Films Deposited On Silicon For Microsystem Applications, Steven L. Meredith Jan 2009

Characterization Of A Viscoelastic Response From Thin Metal Films Deposited On Silicon For Microsystem Applications, Steven L. Meredith

Master's Theses and Project Reports

Understanding the mechanisms that control the mechanical behavior of microscale actuators is necessary to design an actuator that responds to an applied actuation force with the desired behavior. Micro actuators which employ a diaphragm supported by torsional hinges which deform during actuation are used in many applications where device stability and reliability are critical. The material response to the stress developed within the hinge during actuation controls how the actuator will respond to the actuating force. A fully recoverable non-linear viscoelastic response has been observed in electrostatically driven micro actuators employing torsional hinges of silicon covered with thin metal films ...