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Introducing Porous Silicon As A Sacrificial Material To Obtain Cavities In Substrate Of Soi Wafers And A Getter Material For Mems Devices, Wajihuddin Mohammad

Doctoral Dissertations

Microelectromechanical system (MEMS) resonators have been a subject of research for more than four decades. The reason is the huge potential they possess for frequency applications. The use of a MEMS resonator as the timing element has an experimental history and huge progress has been made in this direction. Vacuum encapsulated MEMS resonators are required for high precision frequency control. Hence, a device with a high quality factor and durability is needed. In this effort, a new process for producing a cavity in the substrate of Silicon on insulator (SOI) MEMS devices and augmenting it with a getter using porous …