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Full-Text Articles in Nanoscience and Nanotechnology
Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra
Exploration Of Radiation Damage Mechanism In Mems Devices., Pranoy Deb Shuvra
Electronic Theses and Dissertations
We explored UV, X-ray and proton radiation damage mechanisms in MEMS resonators. T-shaped MEMS resonators of different dimensions were used to investigate the effect of radiation. Radiation damage is observed in the form of resistance and resonance frequency shift of the device. The resistance change indicates a change in free carrier concentration and mobility, while the resonance frequency change indicates a change in mass and/or elastic constant. For 255nm UV radiation, we observed a persistent photoconductivity that lasts for about 60 hours after radiation is turned off. The resonance frequency also decreases 40-90 ppm during irradiation and slowly recovers at …
Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower
Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower
Doctoral Dissertations
Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices. Silicon resonators have poor noise and temperature performance (due to its linear temperature versus frequency coefficient). At the moment the only advantage that silicon resonators have over quartz crystal resonators is a small form factor. The photolithography processing method currently being used in industry is a very tedious task, requiring multiple etching steps …
Integration Of Memristors With Mems For Dynamic Displacement Control, Sergio Fabian Almeida Loya
Integration Of Memristors With Mems For Dynamic Displacement Control, Sergio Fabian Almeida Loya
Open Access Theses & Dissertations
In recent years the demand for high-speed, lower power consumption and large-capacity non-volatile memories has increased. Promisingly the memristor can be used due to its special characteristic of having memory through resistance change. The memristor behavior is not limited to digital applications but it can be used in analog application as well including: memristors in chaotic circuits, amoeba's learning, neural synaptic emulation, reprogrammable and reconfigurable circuits, and for neuromorphic computers. On the other hand Micro Electro Mechanical Systems (MEMS) are small scale structures that can interact with the physical world due to their mechanical properties. These devices are widely used …