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Microwave Acoustic Saw Resonators For Stable High-Temperature Harsh-Environment Static And Dynamic Strain Sensing Applications, Anin K. Maskay

Electronic Theses and Dissertations

High-temperature, harsh-environment static and dynamic strain sensors are needed for industrial process monitoring and control, fault detection, structural health monitoring in power plant environments, steel and refractory material manufacturing, aerospace, and defense applications. Sensor operation in the aforementioned extreme environments require robust devices capable of sustaining the targeted high temperatures, while maintaining a stable sensor response. Current technologies face challenges regarding device or system size, complexity, operational temperature, or stability.

Surface acoustic wave (SAW) sensor technology using high temperature capable piezoelectric substrates and thin film technology has favorable properties such as robustness; miniature size; capability of mass production; reduced installation …