Nanoscience and Nanotechnology Commons^™

Novel Techniques For Quasi Three-Dimensional Nanofabrication Of Transformation Optics Devices, Paul R. West

Open Access Dissertations

Current nanofabrication is almost exclusively limited to top-down, two-dimensional techniques. As technology moves more deeply into the nano-scale regime, fabrication of new devices with quasi three-dimensional geometries shows great potential. One excellent example of an emerging field that requires this type of non-conformal 3D fabrication technique is the field of Transformation Optics. This field involves transforming and manipulating the optical space through which light propagates. Arbitrarily manipulating the optical space requires advanced fabrication techniques, which are not possible with current two-dimensional fabrication technologies. One step toward quasi three-dimensional nanofabrication involves employing angled deposition allowing new growth mechanisms, and enabling a …

An Assessment Of Critical Dimension Small Angle X-Ray Scattering Metrology For Advanced Semiconductor Manufacturing, Charles Michael Settens

Legacy Theses & Dissertations (2009 - 2024)

Simultaneous migration of planar transistors to FinFET architectures, the introduction of a plurality of materials to ensure suitable electrical characteristics, and the establishment of reliable multiple patterning lithography schemes to pattern sub-10 nm feature sizes imposes formidable challenges to current in-line dimensional metrologies. Because the shape of a FinFET channel cross-section immediately influences the electrical characteristics, the evaluation of 3D device structures requires measurement of parameters beyond traditional critical dimension (CD), including their sidewall angles, top corner rounding and footing, roughness, recesses and undercuts at single nanometer dimensions; thus, metrologies require sub-nm and approaching atomic level measurement uncertainty.

Dynamic Control Of Plasmonic Resonances With Graphene Based Nanostructures, Naresh Kumar Emani

Open Access Dissertations

Light incident on a metallic structure excites collective oscillations of electrons termed as plasmons. These plasmons are useful in control and manipulation of information in nanoscale dimensions and at high operating frequencies. Hence, the field of plasmonics opens up the possibility of developing nanoscale optoelectronic circuitry for computing and sensing applications. One of the challenges in this effort is the lack of tunable plasmonic resonance. Currently, the resonant wavelength of plasmonic structure is fixed by the material and structural parameters. Post-fabrication dynamic control of a plasmonic resonance is rather limited.^ In this thesis we explore the combination of optoelectrical properties …

Control Of Light-Matter Interaction Via Dispersion Engineering, Harish Natarajan Swaha Krishnamoorthy

Dissertations, Theses, and Capstone Projects

This thesis describes the design, fabrication and characterization of certain nanostructures to engineer light-matter interaction. These materials have peculiar dispersion properties owing to their structural design, which is exploited to control spontaneous emission properties of emitters such as quantum dots and dye molecules. We will discuss two classes of materials based on the size of their unit cell compared to the wavelength of the electromagnetic radiation they interact with. The first class are hyperbolic metamaterials (HMM) composed of alternate layers of a metal and a dielectric of thicknesses much smaller than the wave- length. Using a HMM composed of silver …

Optical Resonators And Fiber Tapers As Transducers For Detection Of Nanoparticles And Bio-Molecules, Huzeyfe Yilmaz

McKelvey School of Engineering Theses & Dissertations

In recent years, detection of biological interactions on single molecule level has aspired many researchers to investigate several optical, chemical, electrical and mechanical sensing tools. Among these tools, toroidal optical resonators lead the way in detection of the smallest particle/molecule with the real time measurements. In this work, bio-sensing capabilities of toroidal optical resonators are investigated. Bio-sensing is realized via measuring the analyte-antigen interaction while the antigen is immobilized through a novel functionalization method.

Not long ago, detection of single nanoparticles using optical resonators has been accomplished however the need for cost-effective and practical transducers demands simpler tools. A tapered …

Characterizing Nanoparticle Size By Dynamic Light Scattering Technique (Dls), Marzia Zaman

Graduate Theses and Dissertations

The Dynamic Light Scattering Technique was used to determine the size, shape and diffusion coefficient of nanoparticle. The intensity auto correlation functions of light scattered by particles in a solution were measured by using a photomultiplier tube and analyzed to get the relaxation rates for decay of intensity correlations, which correspond to the diffusion constants pertaining to the motion of the particle. In the case of nanorods there are two types of motion - translational and rotational. By dis-entangling the relaxation rates, corresponding to these two types of motion, the shape and size of nanoparticle could be characterized. These experiments, …

Plasmonic Optical Sensors: Performance Analysis And Engineering Towards Biosensing, Peipei Jia

Electronic Thesis and Dissertation Repository

Surface plasmon resonance (SPR) sensing for quantitative analysis of chemical reactions and biological interactions has become one of the most promising applications of plasmonics. This thesis focuses on performance analysis for plasmonic sensors and implementation of plamonic optical sensors with novel nanofabrication techniques.

A universal performance analysis model is established for general two-dimensional plasmonic sensors. This model is based on the fundamental facts of surface plasmon theory. The sensitivity only depends on excitation light wavelength as well as dielectric properties of metal and dielectrics. The expression involves no structure-specified parameters, which validates this formula in broad cases of periodic, quasiperiodic …

Reference Compensation For Localized Surface-Plasmon Resonance Sensors, Neha Nehru

Theses and Dissertations--Electrical and Computer Engineering

Noble metal nanoparticles supporting localized surface plasmon resonances (LSPR) have been extensively investigated for label free detection of various biological and chemical interactions. When compared to other optical sensing techniques, LSPR sensors offer label-free detection of biomolecular interactions in localized sensing volume solutions. However, these sensors also suffer from a major disadvantage – LSPR sensors remain highly susceptible to interference because they respond to both solution refractive index change and non-specific binding as well as specific binding of the target analyte. These interactions can severely compromise the measurement of the target analyte in a complex unknown media and hence limit …

Experimental And Simulation Studies Of Printability Of Buried Euv Mask Defects And Study Of Euv Reflectivity Loss Mechanisms Due To Standard Euv Mask Cleaning Processes, Mihirkant Upadhyaya

Legacy Theses & Dissertations (2009 - 2024)

There's a big push for development and commercialization of extreme ultraviolet (EUV) lithography for high-volume semiconductor manufacturing of 14 nm half-pitch patterning and beyond. One of the primary concerns for making this a reality has been the ability to achieve defect-free masks. My study is focused on two aspects related to the performance degradation of the EUV masks namely EUV mask cleaning induced reflectivity loss mechanisms, and the buried multilayer phase defects in EUV masks.

Femtosecond Laser Patterned Templates And Imprinted Polymer Structures, Deepak Rajput

Doctoral Dissertations

Femtosecond laser machining is a direct-write lithography technique by which user-defined patterns are efficiently and rapidly generated at the surface or within the bulk of transparent materials. When femtosecond laser machining is performed with tightly focused amplified pulses in single-pulse mode, transparent substrates like fused silica can be surface patterned with high aspect ratio (>10:1) and deep (>10 μm) nanoholes. The main objective behind this dissertation is to develop single-pulse amplified femtosecond laser machining into a novel technique for the production of fused silica templates with user-defined patterns made of high aspect ratio nanoholes. The size of the …

The Geometry And Sensitivity Of Ion-Beam Sculpted Nanopores For Single Molecule Dna Analysis, Ryan Connor Rollings

Graduate Theses and Dissertations

In this dissertation, the relationship between the geometry of ion-beam sculpted solid-state nanopores and their ability to analyze single DNA molecules using resistive pulse sensing is investigated. To accomplish this, the three dimensional shape of the nanopore is determined using energy filtered and tomographic transmission electron microscopy. It is shown that this information enables the prediction of the ionic current passing through a voltage biased nanopore and improves the prediction of the magnitude of current drop signals when the nanopore interacts with single DNA molecules. The dimensional stability of nanopores in solution is monitored using this information and is improved …

Fabrication Of Two-Dimensional Nanostructures On Glass Using Nanosphere Lithography, Elmer Jim Wang

Wayne State University Theses

It is desired to have artificial optical materials with controllable optical properties. Optical glass is the most common optical material for various applications. This research will attempt to create a thin layer on the substrate with controllable optical properties. The thin layer is a composite material with nanoscale features and controllable refractive index. Two-dimensional (2D) nanostructures will be created on the surface of optical glass using nanosphere lithography. In comparison with conventional techniques, this approach is more efficient and cost-effective for the creation of large areas of thin surface layers as an artificial material. A uniform monolayer of nanospheres will …

Surface Plasmon Polaritons And Waveguide Modes At Structured And Inhomogeneous Surfaces, Javier Polanco

Open Access Theses & Dissertations

In chapter 1, properties of a p-polarized surface plasmon polariton are studied, propagating circumferentially around a portion of a cylindrical interface between vacuum and a metal, a situation investigated earlier by M. V. Berry (J. Phys. A: Math. Gen. 8, (1975) 1952). When the metal is convex toward the vacuum this mode is radiative and consequently is attenuated as it propagates on the cylindrical surface. An approximate analytic solution of the dispersion relation for this wave is obtained by an approach different from the one used by Berry, and plots of the real and imaginary parts of its wave number …

Mueller Based Scatterometry And Optical Characterization Of Semiconductor Materials, Gangadhara Raja Muthinti

Legacy Theses & Dissertations (2009 - 2024)

Scatterometry is one of the most useful metrology methods for the characterization and control of critical dimensions (CD) and the detailed topography of periodic structures found in microelectronics fabrication processes. Spectroscopic ellipsometry (SE) and normal incidence reflectometry (NI) based scatterometry are the most widely used optical methodologies for metrology of these structures. Evolution of better optical hardware and faster computing capabilities led to the development of Mueller Matrix (MM) based Scatterometry (MMS). Dimensional metrology using full Mueller Matrix (16 element) scatterometry in the wavelength range of 245nm-1000nm was discussed in this work. Unlike SE and NI, MM data provides complete …

Electrohydrodynamic Enhancement Of Heat Transfer And Mass Transport In Gaseous Media, Bulk Dielectric Liquids And Dielectric Thin Liquid Films, Seyed Reza Mahmoudi

Electronic Thesis and Dissertation Repository

Controlling transport phenomena in liquid and gaseous media through electrostatic forces has brought new important scientific and industrial applications. Although numerous EHD applications have been explored and extensively studied so far, the fast-growing technologies, mainly in the semiconductor industry, introduce new challenges and demands. These challenges require enhancement of heat transfer and mass transport in small scales (sometimes in molecular scales) to remove highly concentrated heat fluxes from reduced size devices. Electric field induced flows, or electrohydrodynamics (EHD), have shown promise in both macro and micro-scale devices.

Several existing problems in EHD heat transfer enhancements were investigated in this thesis. …

Nanocomposite Thin Films Of Au Nanoparticles Embedded In Yttria-Stabilized Zirconia For Plasmonic-Based Harsh Environment Gas Detection, Phillip Henry Rogers

Legacy Theses & Dissertations (2009 - 2024)

Increased health concerns due to the emission of gases linked to the production of tropospheric ozone by petroleum based fuel burning engines has resulted in the codification of more stringent emissions regulations domestically. Emissions regulations on commercial jetliners are one of the areas to be met with stricter standards. Currently there is not a sensing technology that can detect the emissions gases in the exhaust stream of a jet turbine engine with lower detection limits that meet these standards.