Nanoscience and Nanotechnology Commons^™

Modeling Of A Roll-To-Roll Plasma Cvd System For Graphene, Yudong Chen, Majed A. Alrefae, Anurag Kumar, Timothy S. Fisher

The Summer Undergraduate Research Fellowship (SURF) Symposium

Graphene is a 2D carbon material that has extraordinary physical properties relevant to many industrial applications such as electronics, oxidation barrier and biosensors. Roll-to-roll plasma chemical vapor deposition (CVD) has been developed to manufacture graphene at large scale. In a plasma CVD chamber, graphene is grown on a copper foil as it passes through a high-temperature plasma region. The temperatures of the gas and the copper foil play important roles in the growth of graphene. Consequently, there is a need to understand the temperature and gas velocity distributions in the system. The heat generated in the plasma creates a thermal …