Nanoscience and Nanotechnology Commons^™

Studies On Semiconductor Gas Sensors Using Nanostructure Growth Employing Ortho-Glancing Angle Deposition, Dean R. Walters

Graduate Research Theses & Dissertations

A program of research was undertaken to develop the next generation of metal oxide gas sensors, which, for the purpose of this research, were made from materials using a unique approach of glancing angle deposition (GLAD) that is scalable to large scale production. This research seeks to demonstrate that high-sensitivity sensors can be produced. The sensors were examined in a test system of novel design in which the units underwent performance measurements using analyte gases, such as carbon dioxide, nitrogen, and water.

Gas sensors can be improved by increasing the surface area of the active sensing media, and in this …