Nanoscience and Nanotechnology Commons^™

Cmos Compatible Carbonization Of Polymer For Elctrochemical Sensors, Mohammad Aminul Haque

Doctoral Dissertations

Carbon-based electrodes that are integrable with CMOS readout electrodes possess great potential in a wide range of cutting-edge applications. The primary scientific contribution is the development of a processing sequence which can be implemented on CMOS chips to fabricate pyrolyzed carbon microelectrodes from 3D printed polymer microstructures to develop lab-on-CMOS monolithic electrochemical sensor systems. Specifically, optimized processing conditions to convert 3D printed polymer micro- and nano-structures to carbonized electrodes have been explored in order to obtain sensing electrodes for lab-on- CMOS electrochemical systems. Processing conditions have been identified, including a sequel of oxidative and inert atmosphere anneals to form pyrolyzed …

Advanced Purification And Direct-Write 3d Nanoprinting Via Focused Electron Beam Induced Deposition, Brett Bloxton Lewis

Doctoral Dissertations

This dissertation addresses three difficulties with focused electron beam induced deposition preventing broader application; purity, spatial control, and mechanical characterization.

Focused electron beam induced deposition (FEBID) has many advantages as a nanoscale fabrication tool. It is compatible for implementation into current lithographic techniques and has the potential to direct-write in a single step nanostructures of a high degree of complexity. FEBID is a very versatile tool capable of fabricating structures of many different compositions ranging from insulating oxides to conducting metals.

Due to the complexity of the technique and the difficulty in directly measuring many important variables, FEBID has remained …