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Full-Text Articles in Nanoscience and Nanotechnology

Progress Report I: Fabrication Of Nanopores In Silicon Nitride Membranes Using Self-Assembly Of Ps-B-Pmma, Unnati Joshi, Vishal Venkatesh, Hiromichi Yamamoto Mar 2019

Progress Report I: Fabrication Of Nanopores In Silicon Nitride Membranes Using Self-Assembly Of Ps-B-Pmma, Unnati Joshi, Vishal Venkatesh, Hiromichi Yamamoto

Protocols and Reports

This progress report describes fabrication of silicon nitride membranes from Si wafers using cleanroom techniques, and of nanopore preparation via a self-assembled PS-b-PMMA film. A 36.9 µm thick membrane is successfully prepared by KOH wet etching. The membrane is a layered structure of 36.8 µm thick Si and 116 nm thick silicon nitride. It is also exhibited that in the 47 nm thick PS-b-PMMA film, the nanopore structure is observed in the vicinity of a dust particle, but most of the area indicates lamellar domain structure. The thickness of PS-b-PMMA film will ...


Characterization And Optimization Of Parylene-C Deposition Process Using Scs Parylene Coater, Hannah Hastings, Eric D. Johnston, Gyuseok Kim Jan 2019

Characterization And Optimization Of Parylene-C Deposition Process Using Scs Parylene Coater, Hannah Hastings, Eric D. Johnston, Gyuseok Kim

Tool Data

Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating Systems. Results show a 12 µm thick Parylene-C film with 10 g of dimer and negligible thickness variation across a wafer. We find a positive linear relationship between film thickness and mass of dimer at a range of 1 g to 18 g. However, the Al boat for dimer was burnt with 18 g of dimer, suggesting multiple depositions with 1 g to 10 g of dimer are recommended to achieve the Parylene-C film thicker than 12 µm.


Characterizing The Energetic Landscape In Solution Processable Solar Cells Via Frequency-Dependent Impedance Measurements, Eric S. Wong Jan 2018

Characterizing The Energetic Landscape In Solution Processable Solar Cells Via Frequency-Dependent Impedance Measurements, Eric S. Wong

Publicly Accessible Penn Dissertations

This thesis presents measurements and analyses aimed at describing charge transport dynamics in quantum dot (QD) photovoltaics (PVs). Due to their solution processability and unique size-dependent optoelectronic properties, ensembles of electronically coupled QDs (QD solids) provide an exciting platform for next generation PV devices. However, the structural disorder associated with the formation of conductive QD solids gives rise to a complicated density of states (DOS) emerging from the distribution of mesoscale charge dynamics occurring in these materials.

I present phenomological models to describe the DOS in the disordered energetic and spatial landscape of QD solids that relies on a suite ...


Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li Jan 2018

Microlamination Based Lumped And Distributed Magnetic Mems Systems Enabled By Through-Mold Sequential Multilayer Electrodeposition Technology, Yuan Li

Publicly Accessible Penn Dissertations

Microfabricated magnetic MEMS components such as permanent micromagnets and soft magnetic structures are key enablers in various lumped and distributed systems such as energy harvesters, magnetometers, biomagnetic filters, and electromagnetic micromotors. The unique functionalities of such systems often require designers to controllably scale the relevant dimensions of a device relative to the characteristic length of a targeted application. We demonstrate in this dissertation that the developed Microlamination Technology could create two-dimensional uniform- or dual- height monolithic metallic structures with additional deterministic structural and compositional complexities along thickness direction, suitable to facilely and flexibly fabricate both lumped and distributed magnetic MEMS ...


Two-Dimensional Nanopore And Nanoporous Devices For Molecular Sensing And Ion Selectivity, Gopinath Danda Jan 2018

Two-Dimensional Nanopore And Nanoporous Devices For Molecular Sensing And Ion Selectivity, Gopinath Danda

Publicly Accessible Penn Dissertations

Nanopore-based devices provide the ability to detect, analyze and manipulate molecules by monitoring changes in ionic current and sieving molecules dissolved in an electrolyte. While devices with single nanopores can be used as molecular sensors and analyzers, including as a possible high-throughput DNA sequencer, devices with multiple nanopores (nanoporous devices) can be used to filter out ions from solutions, with possible use in water desalination. Sensitivity and molecular flux can be enhanced by using two-dimensional (2D) materials, like graphene and transition metal dichalcogenides (TMDs), as the nanopore membrane. However, these devices face challenges yet to be solved, including (a) fast ...


Characterization Of Sputtering Copper Using The Denton Explorer-14 System, Roman Mays, Meredith Metzler Mar 2017

Characterization Of Sputtering Copper Using The Denton Explorer-14 System, Roman Mays, Meredith Metzler

Tool Data

No abstract provided.


Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Silicon Nitride (Sinx) Using Oxford Instruments System 100 Pecvd, Meredith Metzler, Raj Patel Feb 2017

Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Silicon Nitride (Sinx) Using Oxford Instruments System 100 Pecvd, Meredith Metzler, Raj Patel

Tool Data

This report discusses the deposition process of SiNx using the Oxford System 100 PECVD.


Optimization Of Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Amorphous Silicon (A-Si) Using Oxford Instruments System 100 With Taguchi L9 Based Design Of Experiments (Doe), Raj Patel, Meredith Metzler Feb 2017

Optimization Of Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Amorphous Silicon (A-Si) Using Oxford Instruments System 100 With Taguchi L9 Based Design Of Experiments (Doe), Raj Patel, Meredith Metzler

Tool Data

No abstract provided.


Characterization Of Sputtering Platinum Using The Denton Explorer-14 System, Roman Mays Feb 2017

Characterization Of Sputtering Platinum Using The Denton Explorer-14 System, Roman Mays

Tool Data

No abstract provided.


Examination Of The Stoney Equation And A Practical Determination Of The Error In Residual Film Stress Measurements, Roman Mays Feb 2017

Examination Of The Stoney Equation And A Practical Determination Of The Error In Residual Film Stress Measurements, Roman Mays

Protocols and Reports

No abstract provided.


Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Silicon Dioxide (Sio2) Using Oxford Instruments System 100 Pecvd, Meredith Metzler, Raj Patel Feb 2017

Plasma Enhanced Chemical Vapor Deposition (Pecvd) Of Silicon Dioxide (Sio2) Using Oxford Instruments System 100 Pecvd, Meredith Metzler, Raj Patel

Tool Data

This report discusses the deposition process of SiO2 using the Oxford System 100 PECVD.


The Measurement Of Residual Film Stress In Deposited Thin Films Using The Kla-Tencor 2d/3d P7 Surface Profilometer, Roman Mays Feb 2017

The Measurement Of Residual Film Stress In Deposited Thin Films Using The Kla-Tencor 2d/3d P7 Surface Profilometer, Roman Mays

Protocols and Reports

No abstract provided.


Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa Jan 2017

Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa

Protocols and Reports

Ag nanoparticle inkjet printing on polyimide and polyethylene terephthalate films has been performed using Dimatix inkjet printer at Quattrone Nanofabrication Facility. This article describes selection of Ag nanoparticle inks and reports the progress of optimization of drop spacing, drop frequency, droplet size, and waveform for high resolution features, and furthermore reveals the pros and cons of Dimatix inkjet printing. In addition, the resistivity of Ag nanoparticle line sintered was determined to be ~2.2 x 10-5 Ωm. The adhesion and bending tests indicated that Ag nanoparticle pattern sintered on PI and PET films had exceptional mechanical stability.


Flexible, Photopatterned, Colloidal Cdse Semiconductor Nanocrystal Integrated Circuits, Franklin Scott Stinner Jan 2017

Flexible, Photopatterned, Colloidal Cdse Semiconductor Nanocrystal Integrated Circuits, Franklin Scott Stinner

Publicly Accessible Penn Dissertations

As semiconductor manufacturing pushes towards smaller and faster transistors, a parallel goal exists to create transistors which are not nearly as small. These transistors are not intended to match the performance of traditional crystalline semiconductors; they are designed to be significantly lower in cost and manufactured using methods that can make them physically flexible for applications where form is more important than speed. One of the developing technologies for this application is semiconductor nanocrystals.

We first explore methods to develop CdSe nanocrystal semiconducting “inks” into large-scale, high-speed integrated circuits. We demonstrate photopatterned transistors with mobilities of 10 cm2/Vs on ...


Nano/Biosensors Based On Large-Area Graphene, Pedro Jose Ducos Jan 2017

Nano/Biosensors Based On Large-Area Graphene, Pedro Jose Ducos

Publicly Accessible Penn Dissertations

Two dimensional materials have properties that make them ideal for applications in chemical and biomolecular sensing. Their high surface/volume ratio implies that all atoms are exposed to the environment, in contrast to three dimensional materials with most atoms shielded from interactions inside the bulk. Graphene additionally has an extremely high carrier mobility, even at ambient temperature and pressure, which makes it ideal as a transduction device. The work presented in this thesis describes large-scale fabrication of Graphene Field Effect Transistors (GFETs), their physical and chemical characterization, and their application as biomolecular sensors. Initially, work was focused on developing an ...


Filomicelles Deliver A Chemo-Differentiative Therapy To Durably Control Carcinoma Cell Fate, Praful Raveendran Nair Jan 2017

Filomicelles Deliver A Chemo-Differentiative Therapy To Durably Control Carcinoma Cell Fate, Praful Raveendran Nair

Publicly Accessible Penn Dissertations

Current chemotherapy causes a host of side effects and better delivery of drugs to tumors is required to reduce this. Nanocarriers have been proven to not only deliver better to tumors but also solubilize more drugs in the core, with flexible ‘filomicelles’ being particularly effective. They are still open to improvements and one obvious way is to increase drug loading and hence drug dosage delivered to tumors. In the first part, the core of filomicelles was modified by the integration of aromatic groups into the hydrophobic block of a degradable di-block copolymer with the aim of improving delivery of aromatic ...


Beyond Graphene: Monolayer Transition Metal Dichalcogenides, A New Platform For Science, Carl Hugo Naylor Jan 2017

Beyond Graphene: Monolayer Transition Metal Dichalcogenides, A New Platform For Science, Carl Hugo Naylor

Publicly Accessible Penn Dissertations

Following the isolation of graphene in 2004, scientists quickly showed that it possesses remarkable properties. However, as the scientific understanding of graphene matured, it became clear that it also has limitations: for example, graphene does not have a bandgap, making it poorly suited for use in digital logic. This motivated explorations of monolayer materials “beyond graphene”, which could embody functionalities that graphene lacks. Transition metal dichalcogenides (TMDs) are leading candidates in this field. TMDs possess a wide variety of properties accessible through the choice of chalcogen atom, metal atom and atomic configuration (1H, 1T, and 1T’). Similar to graphene, monolayer ...


Understanding Dewetting Transitions On Nanotextured Surfaces: Implications For Designing Surfaces With Improved Wettability, Suruchi Fialoke Jan 2017

Understanding Dewetting Transitions On Nanotextured Surfaces: Implications For Designing Surfaces With Improved Wettability, Suruchi Fialoke

Publicly Accessible Penn Dissertations

Despite the early promise of superhydrophobic surfaces, their widespread technological adoption has been dawdled by the ease with which water can penetrate the surface texture, resulting in a breakdown of superhydrophobicity. Furthermore, this breakdown is believed to be irreversible, because large adhesion barriers impede the dewetting of the surface texture and the concomitant recovery of superhydrophobicity. Using molecular dynamics simulations in conjunction with advanced sampling techniques, in this thesis, we challenge this conventional argument. We show that while large barriers do typically impede the recovery of superhydrophobicity, it can nevertheless be recovered spontaneously on nanotextured surfaces, wherein collective water density ...


Design And Synthesis Of Gold Nanoparticle Contrast Agents For Atherosclerosis Imaging With Computed Tomography, Peter Chhour Jan 2017

Design And Synthesis Of Gold Nanoparticle Contrast Agents For Atherosclerosis Imaging With Computed Tomography, Peter Chhour

Publicly Accessible Penn Dissertations

Cell tracking offers the opportunity to study migration and localization of cells in vivo, allowing investigations of disease mechanisms and drug efficacy. Monocytes play a key role in the progression of atherosclerotic plaques in the coronary arteries. While x-ray computed tomography (CT) is commonly used to clinically assess coronary plaque burden, cell tracking with CT is mostly unexplored. The establishment of monocyte cell tracking tools would allow for the direct investigation of gene and drug therapies aimed at monocyte recruitment in atherosclerosis. In this thesis, we present the design and optimization of gold nanoparticles as CT contrast agents for cell ...


Zep520a Contrast Curves, Gerald G. Lopez Ph.D., Mohsen Azadi Dec 2016

Zep520a Contrast Curves, Gerald G. Lopez Ph.D., Mohsen Azadi

Protocols and Reports

This report documents the contrast curves for the ZEP520A electron beam lithography resist from ZEON Chemicals. Dilution by weight of ZEP520A vs spin speed from 1000 to 6000 rpm was generated in previous work. The aim is to provide an approximate clearing and base dose for the ZEP520A standard process at the Singh Center for Nanotechnology.


Pmma A2 Contrast Curves, Gerald G. Lopez Ph.D., Mohsen Azadi Dec 2016

Pmma A2 Contrast Curves, Gerald G. Lopez Ph.D., Mohsen Azadi

Protocols and Reports

This report documents the contrast curves for the PMMA A2 electron beam lithography resist from MicroChem. Spin curves for PMMA A2 can be found in previous work. The aim is to provide an approximate clearing and base dose for the PMMA A2 standard process at the Singh Center for Nanotechnology.


Elionix Els-7500ex: Field Size Analysis, Gerald G. Lopez Ph.D., Mohsen Azadi Dec 2016

Elionix Els-7500ex: Field Size Analysis, Gerald G. Lopez Ph.D., Mohsen Azadi

Protocols and Reports

This report documents the field distortion of the Elionix ELS-7500EX electron beam lithography system at the University of Pennsylvania Singh Center for Nanotechnology at the Quattrone Nanofabrication Facility. The system is equipped with a 20MHz fixed clock and fixed focus. The aim of the work is to understand optimal field sizes to use for critical dimensions 80nm and above. Field uniformity was analyzed as a function of critical dimension and objective lens aperture (OLA) a.k.a. final paerture. As features scale down below 300nm, they are more susceptible to the systematic effects of field distortion. Suggested field sizes depend ...


Characterization Of Silicon Deep Reactive Ion Etching Using The Spts Rapier, Mohsen Azadi, Meredith Metzler, Gerald G. Lopez Oct 2016

Characterization Of Silicon Deep Reactive Ion Etching Using The Spts Rapier, Mohsen Azadi, Meredith Metzler, Gerald G. Lopez

Protocols and Reports

This technical report examines the silicon etch process using the SPTS Rapier Si DRIE system and highlights the difference in etch properties between small (~10 micron) and large (~500 micron) features.


Characterization Of Silicon Dioxide (Sio2) And Microchem S1800 Resist Etching Using Oxford 80 Plus Rie, Mohsen Azadi, Meredith Metzler, Gerald G. Lopez Oct 2016

Characterization Of Silicon Dioxide (Sio2) And Microchem S1800 Resist Etching Using Oxford 80 Plus Rie, Mohsen Azadi, Meredith Metzler, Gerald G. Lopez

Protocols and Reports

This technical report describes the process of etching silicon dioxide (SiO2) and Microchem S1800 resist using the Oxford 80 Plus Reactive Ion Etch (RIE) system.


Directed Self-Assembly Of Block Copolymer, No1, Hiromichi Yamamoto Aug 2016

Directed Self-Assembly Of Block Copolymer, No1, Hiromichi Yamamoto

Protocols and Reports

The PS-rich and neutral PS-b-PMMA block copolymer (BCP) films were spin coated on the neutral random copolymer hydroxyl-terminated PS-r-PMMA layers grafted on the native oxide and 50 nm thick PECVD amorphous silicon oxide layers. Relationship between the grafting density of BCP and surface density of hydroxyl moiety on silicon oxide is discussed. Furthermore, optimization of annealing BCP films is reported, and wetted and de-wetted BCP films are shown in optical microscope images. In addition, finger print and nanopore structures of BCP films are also indicated in SEM images.


Metal Assisted Chemical Etching, Inayat Bajwa May 2016

Metal Assisted Chemical Etching, Inayat Bajwa

Protocols and Reports

No abstract provided.


Reactive Ion Etch (Rie) Of Silicon And Zep520a Resist Mask With Tetrafluoromethane (Cf4) Using Oxford 80 Plus, Steven Wood, Gerald G. Lopez, Meredith Metzler May 2016

Reactive Ion Etch (Rie) Of Silicon And Zep520a Resist Mask With Tetrafluoromethane (Cf4) Using Oxford 80 Plus, Steven Wood, Gerald G. Lopez, Meredith Metzler

Tool Data

This report discusses the results of etching silicon with electron beam lithography defined features in ZEP520A resist using CF4 in the Oxford 80 Plus RIE.


Self-Aligned Double Pattern, No1, Yinong Cao May 2016

Self-Aligned Double Pattern, No1, Yinong Cao

Protocols and Reports

No abstract provided.


Reactive Ion Etch (Rie) Of Silicon Nitride (Sinx) With Trifluoromethane And Oxygen (Chf3/O2), Meredith Metzler May 2016

Reactive Ion Etch (Rie) Of Silicon Nitride (Sinx) With Trifluoromethane And Oxygen (Chf3/O2), Meredith Metzler

Tool Data

This report discusses the CHF3/O2 etch process of SiNx using the Oxford 80 Plus RIE.


Reactive Ion Etch (Rie) Of Silicon Dioxide (Sio2) With Tetrafluoromethane (Cf4), Meredith Metzler May 2016

Reactive Ion Etch (Rie) Of Silicon Dioxide (Sio2) With Tetrafluoromethane (Cf4), Meredith Metzler

Tool Data

This report discusses the CF4 etch process of SiO2 using the Oxford 80 Plus RIE.