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Quartz-Mems: Wet Chemical Etching Assisted By Electromagnetic Energy Sources For The Development Of Quartz Crystal To Be Used For Microelectromechanical Systems, William J. Clower

Doctoral Dissertations

Quartz crystal resonators have been the most commonly used timing devices to date. Today's timing market requires devices to be as small as possible and consume smaller amounts of energy. Because of the market demand, many startup companies have formed to develop silicon resonators as timing devices. Silicon resonators have poor noise and temperature performance (due to its linear temperature versus frequency coefficient). At the moment the only advantage that silicon resonators have over quartz crystal resonators is a small form factor. The photolithography processing method currently being used in industry is a very tedious task, requiring multiple etching steps …