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Characterization Of Piezoceramic Crosses With Large Range Scanning Capability And Applications For Low Temperature Scanning Tunneling Microscopy, J. A. Helfrich, Shireen Adenwalla, J. B. Ketterson, G. A. Zhitomirsky

Shireen Adenwalla Papers

We have developed a large amplitude piezoceramic scanner which should have numerous applications. Scanning tunneling microscopy (STM) and other scanning probe microscopies predominantly use piezoceramics for the scanning elements. Similarly adaptive optics, high resolution lithography, and micromanipulators are other examples of research which regularly utilize piezoceramic scanners. We present a new geometry for a piezoceramic scanner which allows for both high resolution (~nanometers) and large amplitude (~400 µm) displacements. The cross-shaped geometry makes it possible to produce extremely long pieces with very high tolerances. We have shown its effectiveness by using it as the major component of a low temperature …