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Numerical And Experimental Studies Of Atomic Layer Deposition For Sustainability Improvement, Dongqing Pan May 2016

Numerical And Experimental Studies Of Atomic Layer Deposition For Sustainability Improvement, Dongqing Pan

Theses and Dissertations

Atomic layer deposition (ALD) is an approved nano-scale thin films fabrication technique with remarkable uniformity and conformity in surface geometry. This dissertation presents numerical and experimental studies to investigate the transient physical and chemical ALD process in order to improve its sustainability performance in terms of throughput, wastes and emissions.

To be specific, in this dissertation, the transient process of ALD is studied extensively through both numerical and experimental approaches to find the influential factors on the two main critical sustainability issues: low throughput and negative environmental impacts. Different numerical schemes are developed and studied for ALD process simulations. In ...


Effects Of Surface Topography And Vibrations On Wetting: Superhydrophobicity, Icephobicity And Corrosion Resistance, Rahul Ramachandran May 2016

Effects Of Surface Topography And Vibrations On Wetting: Superhydrophobicity, Icephobicity And Corrosion Resistance, Rahul Ramachandran

Theses and Dissertations

Concrete and metallic materials are widely used in construction and water industry. The interaction of both these materials with water and ice (or snow) produces undesirable results and is therefore of interest. Water that gets absorbed into the pores of dry concrete expands on freezing and can lead to crack formation. Also, the ice accretion on concrete surfaces such as roadways can have disastrous consequence. Metallic components used in the water industry undergo corrosion due to contact with aqueous corrosive solutions. Therefore, it is desirable to make concrete water/ice-repellent, and to make metallic surfaces corrosion-resistant.

Recent advances in micro ...